Adhesion and Moisture Barrier Characteristics of Roller-Cast Polydimethylsiloxane Encapsulants for Implantable Microsystems.

Shem B Lachhman, Christian A Zorman, Wen H Ko
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引用次数: 14

Abstract

Poly-dimethylsiloxane (PDMS) is a highly attractive polymer to encapsulate implantable micro-electromechanical systems (MEMS) due to its biocompatibility, simplicity in processing, and low Young's Modulus. However, conventional deposition processes introduce defects that prevent the use of PDMS as a long term packaging material. In order to address these issues, we have developed a novel roller-casting process for depositing PDMS. This paper presents the findings of a study to simultaneously investigate the adhesion properties and moisture barrier characteristics of roller-cast, multilayered PDMS encapsulants subjected to testing in saline at 85°C.

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可植入微系统用滚铸模聚二甲基硅氧烷包封剂的粘附性和隔湿性。
聚二甲基硅氧烷(PDMS)由于其生物相容性、加工简单和低杨氏模量,是一种非常有吸引力的可封装植入式微机电系统(MEMS)的聚合物。然而,传统的沉积工艺引入了缺陷,阻碍了PDMS作为长期包装材料的使用。为了解决这些问题,我们开发了一种新的辊铸工艺来沉积PDMS。本文介绍了一项研究的结果,该研究同时研究了辊铸多层PDMS包封剂在85°C盐水中进行测试的粘附性能和防潮特性。
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