Andrew R Gibson, Zoltán Donkó, Layla Alelyani, Lena Bischoff, Gerrit Hübner, Jérôme Bredin, Scott Doyle, Ihor Korolov, Kari Niemi, Thomas Mussenbrock, Peter Hartmann, James P Dedrick, Julian Schulze, Timo Gans, Deborah O'Connell
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引用次数: 0
Abstract
Single frequency, geometrically symmetric Radio-Frequency (rf) driven atmospheric pressure plasmas exhibit temporally and spatially symmetric patterns of electron heating, and consequently, charged particle densities and fluxes. Using a combination of phase-resolved optical emission spectroscopy and kinetic plasma simulations, we demonstrate that tailored voltage waveforms consisting of multiple rf harmonics induce targeted disruption of these symmetries. This confines the electron heating to small regions of time and space and enables the electron energy distribution function to be tailored.
期刊介绍:
Plasma Sources Science and Technology (PSST) reports on low-temperature plasmas and ionized gases operating over all ranges of gas pressure and plasma density, with varying degrees of ionization. The emphasis of PSST is on the fundamental science of these plasmas, their sources and the physical and chemical processes initiated or sustained by them, as elucidated through theoretical, computational or experimental techniques. PSST also reports on new experimentally or theoretically derived fundamental data (e.g. cross sections, transport coefficients) required for investigation of low temperature plasmas. Reports that relate to the technology and applications of these plasmas should be closely linked to the science and fundamental processes occurring in the plasma state.