Experimental Investigation of Piezoelectric Micropumps with Single, Series or Parallel Pump Chambers

IF 0.8 4区 工程技术 Q4 ACOUSTICS International Journal of Acoustics and Vibration Pub Date : 2020-09-30 DOI:10.20855/ijav.2020.25.31688
Yanfang Guan, Mingyang Bai, Xiangxin Meng, Yansheng Liu, Fengqian Xu
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引用次数: 2

Abstract

Three types of piezoelectric micropumps following different configurations: single, series, and parallel connection, are developed and investigated. All the micropumps are fabricated by wet etching technology and sealed by high temperature glass bonding. They share the same dimension characteristic of diffuser/nozzle microchannels. Verifying the impact of adding series or parallel connected pump chambers on single chambers, as well as verifying the performance of the flow rate, pressure and piezoelectric transducer vibration of three micropumps have been examined. Through the comparisons between three kinds of micropumps, the results show that the flow rate of the micropumps with parallel connected pump chambers have a higher flow rate than that of micropumps with single and serial connected pump chambers under the same driving conditions. In addition, both the flow rate and pressure with the serial micropump are the lowest. The pressure of the micropump with single pump chamber is larger than other kinds of micropumps at certain driving frequencies. Consequently, increasing the pump chambers cannot always increase the performance of the micropump. This coincides with the theory analysis. Finally, the vibration performance of piezoelectric transducers with three micropumps have been carried out. The parallel transducer has a higher vibration displacement than the other two kinds of micropumps. These results have great potentials for integration into labs with a chip or microfluidic driven systems.
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单、串联或并联泵室压电微泵的实验研究
开发并研究了三种不同结构的压电微泵:单、串联和并联。所有的微泵都是通过湿法刻蚀技术制造的,并通过高温玻璃键合进行密封。它们具有与扩散器/喷嘴微通道相同的尺寸特性。验证了增加串联或并联泵室对单室的影响,以及验证了三个微型泵的流量、压力和压电换能器振动的性能。通过对三种微型泵的比较,结果表明,在相同的驱动条件下,具有并联泵室的微型泵的流量高于具有单泵室和串联泵室的小型泵的流量。此外,串联微型泵的流量和压力都是最低的。在一定的驱动频率下,单泵室微型泵的压力比其他类型的微型泵大。因此,增加泵室不能总是提高微型泵的性能。这与理论分析不谋而合。最后,对三个微泵压电换能器的振动性能进行了测试。并联换能器具有比其他两种微泵更高的振动位移。这些结果在集成到具有芯片或微流体驱动系统的实验室中具有巨大潜力。
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来源期刊
International Journal of Acoustics and Vibration
International Journal of Acoustics and Vibration ACOUSTICS-ENGINEERING, MECHANICAL
CiteScore
1.60
自引率
10.00%
发文量
0
审稿时长
12 months
期刊介绍: The International Journal of Acoustics and Vibration (IJAV) is the refereed open-access journal of the International Institute of Acoustics and Vibration (IIAV). The IIAV is a non-profit international scientific society founded in 1995. The primary objective of the Institute is to advance the science of acoustics and vibration by creating an international organization that is responsive to the needs of scientists and engineers concerned with acoustics and vibration problems all around the world. Manuscripts of articles, technical notes and letters-to-the-editor should be submitted to the Editor-in-Chief via the on-line submission system. Authors wishing to submit an article need to log in on the IJAV website first. Users logged into the website are able to submit new articles, track the status of their articles already submitted, upload revised articles, responses and/or rebuttals to reviewers, figures, biographies, photographs, copyright transfer agreements, and send comments to the editor. Each time the status of an article submitted changes, the author will also be notified automatically by email. IIAV members (in good standing for at least six months) can publish in IJAV free of charge and their papers will be displayed on-line immediately after they have been edited and laid-out. Non-IIAV members will be required to pay a mandatory Article Processing Charge (APC) of $200 USD if the manuscript is accepted for publication after review. The APC fee allows IIAV to make your research freely available to all readers using the Open Access model. In addition, Non-IIAV members who pay an extra voluntary publication fee (EVPF) of $500 USD will be granted expedited publication in the IJAV Journal and their papers can be displayed on the Internet after acceptance. If the $200 USD (APC) publication fee is not honored, papers will not be published. Authors who do not pay the voluntary fixed fee of $500 USD will have their papers published but there may be a considerable delay. The English text of the papers must be of high quality. If the text submitted is of low quality the manuscript will be more than likely rejected. For authors whose first language is not English, we recommend having their manuscripts reviewed and edited prior to submission by a native English speaker with scientific expertise. There are many commercial editing services which can provide this service at a cost to the authors.
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