E. Ponizovskaya-Devine, A. Mayet, Amita Rawat, Ahasan Ahamed, Shih-Yuan Wang, A. Elrefaie, Toshishige Yamada, M. Saif Islam
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引用次数: 2
Abstract
Abstract. We present a germanium “Ge-on-Si” CMOS image sensor with backside illumination for the near-infrared (NIR) electromagnetic waves (wavelength range 300 to 1700 nm) detection essential for optical sensor technology. The microholes help to enhance the optical efficiency and extend the range to the 1.7-μm wavelength. We demonstrate an optimization for the width and depth of the microholes for maximal absorption in the NIR. We show a reduction in the crosstalk by employing thin SiO2 deep trench isolation in between the pixels. Finally, we show a 26 to 50% reduction in the device capacitance with the introduction of a microhole. Such CMOS-compatible Ge-on-Si sensors will enable high-density, ultrafast, and efficient NIR imaging.
期刊介绍：
Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance.
Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.
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