Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films

IF 0.8 Q4 INSTRUMENTS & INSTRUMENTATION Journal of Sensors and Sensor Systems Pub Date : 2022-05-06 DOI:10.5194/jsss-11-137-2022
G. Schultes, M. Cerino, A. Lellig, M. Koch
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Abstract

Abstract. The family of sputter deposited granular metal-based carbon-containing sensor films is known for their high sensitivity transforming force-dependent strain into electrical resistance change. Among them nickel–carbon thin films possess a gauge factor of up to 30, compared to only 2 for traditional sensor films of metal alloys. This high sensitivity is based on disordered interparticle tunneling through barriers of graphite-like carbon walls between metal–carbon particles of columnar shape. Force and pressure sensors would benefit a lot from the elevated piezoresistivity. A disadvantage, however, is a disturbing temporal creep and drift of the resistance under load and temperature. This contribution shows how to stabilize such sensor films. A significant stabilization is achieved by partially replacing nickel with chromium, albeit at the expense of sensitivity. The more chromium used in these NixCr1−x-C layers, the higher the optimum annealing temperature can be selected and the better the electrical stabilization. A good compromise while maintaining sensitivities well above the standard of 2 is identified for films with x=0.5 to 0.9, stabilized by optimized temperature treatments. The stabilizing effect of chromium is revealed by transmission electron microscopy with elemental analysis. The post-annealing drives segregation processes in the layer material. While the interior of the layer is depleted of chromium and carbon, boundary layers are formed. Chromium is enriched near the surface boundary, oxidized in air and forms chromium-rich oxide sub-layers, which are chemically very stable and protect against further reactions and corrosion. As a result, creep and drift errors are greatly reduced, so that the optimized sensor coatings are now suitable for widespread use.
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提高高压阻镍碳传感器薄膜的电学和结构稳定性
摘要溅射沉积的基于颗粒金属的含碳传感器膜家族以其将力相关应变转化为电阻变化的高灵敏度而闻名。其中,镍-碳薄膜的应变系数高达30,而传统的金属合金传感器薄膜只有2。这种高灵敏度是基于无序的颗粒间隧道穿过圆柱形金属-碳颗粒之间的类石墨碳壁屏障。力和压力传感器将从提高的压阻率中受益匪浅。然而,缺点是在负载和温度下电阻的时间蠕变和漂移令人不安。这一贡献展示了如何稳定这种传感器薄膜。通过用铬部分取代镍实现了显著的稳定性,尽管代价是灵敏度。在这些NixCr1−x-C层中使用的铬越多,可以选择的最佳退火温度就越高,并且电稳定性就越好。对于x=0.5至0.9的薄膜,在保持灵敏度远高于2的标准的同时,通过优化的温度处理进行稳定,这是一个很好的折衷方案。透射电镜结合元素分析揭示了铬的稳定作用。后退火驱动层材料中的偏析过程。当该层内部的铬和碳耗尽时,就会形成边界层。铬在表面边界富集,在空气中氧化,形成富含铬的氧化层,其化学性质非常稳定,可防止进一步反应和腐蚀。结果,蠕变和漂移误差都大大减小,因此优化后的传感器涂层适合广泛使用。
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来源期刊
Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems INSTRUMENTS & INSTRUMENTATION-
CiteScore
2.30
自引率
10.00%
发文量
26
审稿时长
23 weeks
期刊介绍: Journal of Sensors and Sensor Systems (JSSS) is an international open-access journal dedicated to science, application, and advancement of sensors and sensors as part of measurement systems. The emphasis is on sensor principles and phenomena, measuring systems, sensor technologies, and applications. The goal of JSSS is to provide a platform for scientists and professionals in academia – as well as for developers, engineers, and users – to discuss new developments and advancements in sensors and sensor systems.
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