Pub Date : 2024-07-22DOI: 10.5194/jsss-13-187-2024
Sandra Schober, Erwin Schimbäck, Klaus Pendl, Kurt Pichler, Valentin Sturm, Frederick Runte
Abstract. A human activity recognition (HAR) system carried by masseurs for controlling a therapy table via different movements of legs or hip is studied. This work starts with a survey on HAR systems using the sensor position named “trouser pockets”. Afterwards, in the experiments, the impacts of different hardware systems, numbers of subjects, data generation processes (online streams/offline data snippets), sensor positions, sampling rates, sliding window sizes and shifts, feature sets, feature elimination processes, operating legs, tag orientations, classification processes (concerning method, parameters and an additional smoothing process), numbers of activities, training databases, and the use of a preceding teaching process on the classification accuracy are examined to get a thorough understanding of the variables influencing the classification quality. Besides the impacts of different adjustable parameters, this study also serves as an advisor for the implementation of classification tasks. The proposed system has three operating classes: do nothing, pump therapy table up or pump therapy table down. The first operating class consists of three activity classes (go, run, massage) such that the whole classification process exists with five classes. Finally, using online data streams, a classification accuracy of 98 % could be achieved for one skilled subject and about 90 % for one randomly chosen subject (mean of 1 skilled and 11 unskilled subjects). With the LOSO (leave-one-subject-out) technique for 12 subjects, up to 86 % can be attained. With our offline data approach, we get accuracies of 98 % for 12 subjects and up to 100 % for 1 skilled subject.
{"title":"Human activity recognition system using wearable accelerometers for classification of leg movements: a first, detailed approach","authors":"Sandra Schober, Erwin Schimbäck, Klaus Pendl, Kurt Pichler, Valentin Sturm, Frederick Runte","doi":"10.5194/jsss-13-187-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-187-2024","url":null,"abstract":"Abstract. A human activity recognition (HAR) system carried by masseurs for controlling a therapy table via different movements of legs or hip is studied. This work starts with a survey on HAR systems using the sensor position named “trouser pockets”. Afterwards, in the experiments, the impacts of different hardware systems, numbers of subjects, data generation processes (online streams/offline data snippets), sensor positions, sampling rates, sliding window sizes and shifts, feature sets, feature elimination processes, operating legs, tag orientations, classification processes (concerning method, parameters and an additional smoothing process), numbers of activities, training databases, and the use of a preceding teaching process on the classification accuracy are examined to get a thorough understanding of the variables influencing the classification quality. Besides the impacts of different adjustable parameters, this study also serves as an advisor for the implementation of classification tasks. The proposed system has three operating classes: do nothing, pump therapy table up or pump therapy table down. The first operating class consists of three activity classes (go, run, massage) such that the whole classification process exists with five classes. Finally, using online data streams, a classification accuracy of 98 % could be achieved for one skilled subject and about 90 % for one randomly chosen subject (mean of 1 skilled and 11 unskilled subjects). With the LOSO (leave-one-subject-out) technique for 12 subjects, up to 86 % can be attained. With our offline data approach, we get accuracies of 98 % for 12 subjects and up to 100 % for 1 skilled subject.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":0.8,"publicationDate":"2024-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141817700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-07-12DOI: 10.5194/jsss-13-179-2024
J. Monsalve, Uwe Völz, M. Jongmanns, Björn Betz, Sergiu Langa, Christine Ruffert, Jörg Amelung, M. Wiersig
Abstract. The implementation of the “power-to-gas” concept, where hydrogen and natural gas are blended and transported in the existing network, requires a quick, on-site method to monitor the content of hydrogen in the mixture. We evaluate a rapid characterisation of this mixture based on the measurement of the speed of sound, using micromachined ultrasonic transducers (MUTs). Two MUT-based prototypes were implemented to analyse a mixture of natural gas and hydrogen under controlled conditions. Changes in the hydrogen content below 2 mol % (in a mixture that was adjusted between 6 mol % and 16 mol %) were discriminated by both devices, including the uncertainty due to the temperature compensation and the time-delay estimation. The obtained values of the speed of sound were consistent with those calculated from independent, non-acoustic measurements performed with a gas chromatograph and a density sensor. An MUT-based flow meter is thus capable of reporting both gas intake and the molar fraction of hydrogen, provided that the source of natural gas is kept constant.
{"title":"Rapid characterisation of mixtures of hydrogen and natural gas by means of ultrasonic time-delay estimation","authors":"J. Monsalve, Uwe Völz, M. Jongmanns, Björn Betz, Sergiu Langa, Christine Ruffert, Jörg Amelung, M. Wiersig","doi":"10.5194/jsss-13-179-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-179-2024","url":null,"abstract":"Abstract. The implementation of the “power-to-gas” concept, where hydrogen and natural gas are blended and transported in the existing network, requires a quick, on-site method to monitor the content of hydrogen in the mixture. We evaluate a rapid characterisation of this mixture based on the measurement of the speed of sound, using micromachined ultrasonic transducers (MUTs). Two MUT-based prototypes were implemented to analyse a mixture of natural gas and hydrogen under controlled conditions. Changes in the hydrogen content below 2 mol % (in a mixture that was adjusted between 6 mol % and 16 mol %) were discriminated by both devices, including the uncertainty due to the temperature compensation and the time-delay estimation. The obtained values of the speed of sound were consistent with those calculated from independent, non-acoustic measurements performed with a gas chromatograph and a density sensor. An MUT-based flow meter is thus capable of reporting both gas intake and the molar fraction of hydrogen, provided that the source of natural gas is kept constant.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":0.8,"publicationDate":"2024-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141654142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-07-09DOI: 10.5194/jsss-13-167-2024
D. Kohlmann, M. Schewe, H. Wulfmeier, Christian Rembe, Holger Fritze
Abstract. A method is presented by which very small, slow, anharmonic signals can be extracted from measurement data overlaid with noise that is orders of magnitude larger than the signal of interest. To this end, a multi-step filtering process is applied to a time signal containing the time-dependent displacement of the surface of a sample, which is determined with a contactless measurement method, differential laser Doppler vibrometry (D-LDV), at elevated temperatures. The time signal contains the phase difference of the measurement and reference laser beams of the D-LDV, already greatly reducing noise from, e.g., length fluctuations, heat haze, and mechanical vibrations. In postprocessing of the data, anharmonic signal contributions are identified and extracted to show the accurate displacement originating from thickness changes of thin films and related sample bending. The approach is demonstrated on a Pr0.1Ce0.9O2−δ (PCO) thin film deposited on a single-crystalline ZrO2-based substrate. The displacement extracted from the data is ca. 38 % larger and the uncertainty ca. 35 % lower than those calculated directly from the D-LDV spectrum.
{"title":"Extraction of nanometer-scale displacements from noisy signals at frequencies down to 1 mHz obtained by differential laser Doppler vibrometry","authors":"D. Kohlmann, M. Schewe, H. Wulfmeier, Christian Rembe, Holger Fritze","doi":"10.5194/jsss-13-167-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-167-2024","url":null,"abstract":"Abstract. A method is presented by which very small, slow, anharmonic signals can be extracted from measurement data overlaid with noise that is orders of magnitude larger than the signal of interest. To this end, a multi-step filtering process is applied to a time signal containing the time-dependent displacement of the surface of a sample, which is determined with a contactless measurement method, differential laser Doppler vibrometry (D-LDV), at elevated temperatures. The time signal contains the phase difference of the measurement and reference laser beams of the D-LDV, already greatly reducing noise from, e.g., length fluctuations, heat haze, and mechanical vibrations. In postprocessing of the data, anharmonic signal contributions are identified and extracted to show the accurate displacement originating from thickness changes of thin films and related sample bending. The approach is demonstrated on a Pr0.1Ce0.9O2−δ (PCO) thin film deposited on a single-crystalline ZrO2-based substrate. The displacement extracted from the data is ca. 38 % larger and the uncertainty ca. 35 % lower than those calculated directly from the D-LDV spectrum.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":0.8,"publicationDate":"2024-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141665469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-07-08DOI: 10.5194/jsss-13-147-2024
Sohrab Shojaei Khatouni, Sven Zakowski, Reza Hosseini Vedad, Mustafa Masjedi, Akram Askar, Jan Christian Eli Ewald, H. Trieu
Abstract. This paper presents the development and evaluation of four sensors based on multiple fiber Bragg grating (FBG) constellations embedded in a silicon dioxide single-mode fiber (SMF) for simultaneous measurement of pressure, temperature, and bending curvature. We applied dimension and material variations – including core, cladding, and coating dimensions; coating material; and the number and arrangement of the FBGs – to optimize the reflected signal response and increase information density. A bootstrap-aggregated ensemble of decision trees was used to evaluate the sensor signal. The results show that adjusting the cladding-to-coating ratio led to significant improvements in pressure and bending prediction performance. Additionally, two combined FBGs were fabricated to form a fiber Bragg grating Fabry–Pérot interferometer, which enabled the detection of curvature with a root-mean-square error (RMSE) of 0.0034 L mm−1 (R2=1), axial pressure with an RMSE of 0.0564 bar (R2=0.99), and temperature with an RMSE of 0.0265 °C (R2=1). At the time of writing, there is no commercially available instrument that can perform these measurements simultaneously.
摘要本文介绍了基于嵌入二氧化硅单模光纤 (SMF) 的多个光纤布拉格光栅 (FBG) 星群的四种传感器的开发和评估，用于同时测量压力、温度和弯曲曲率。我们应用了尺寸和材料变化--包括纤芯、包层和涂层尺寸；涂层材料；以及 FBG 的数量和排列--来优化反射信号响应并提高信息密度。采用自举法聚合决策树来评估传感器信号。结果表明，调整包层与涂层的比例可显著提高压力和弯曲预测性能。此外，还制作了两个组合式 FBG，以形成光纤布拉格光栅法布里-佩罗干涉仪，从而能够检测曲率，均方根误差 (RMSE) 为 0.0034 L mm-1 (R2=1)，轴向压力 RMSE 为 0.0564 bar (R2=0.99)，温度 RMSE 为 0.0265 °C (R2=1)。在撰写本报告时，还没有一种商用仪器可以同时进行这些测量。
{"title":"Concatenated Bragg grating fiber-optic sensors for simultaneous measurement of curvature, temperature, and axial pressure","authors":"Sohrab Shojaei Khatouni, Sven Zakowski, Reza Hosseini Vedad, Mustafa Masjedi, Akram Askar, Jan Christian Eli Ewald, H. Trieu","doi":"10.5194/jsss-13-147-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-147-2024","url":null,"abstract":"Abstract. This paper presents the development and evaluation of four sensors based on multiple fiber Bragg grating (FBG) constellations embedded in a silicon dioxide single-mode fiber (SMF) for simultaneous measurement of pressure, temperature, and bending curvature. We applied dimension and material variations – including core, cladding, and coating dimensions; coating material; and the number and arrangement of the FBGs – to optimize the reflected signal response and increase information density. A bootstrap-aggregated ensemble of decision trees was used to evaluate the sensor signal. The results show that adjusting the cladding-to-coating ratio led to significant improvements in pressure and bending prediction performance. Additionally, two combined FBGs were fabricated to form a fiber Bragg grating Fabry–Pérot interferometer, which enabled the detection of curvature with a root-mean-square error (RMSE) of 0.0034 L mm−1 (R2=1), axial pressure with an RMSE of 0.0564 bar (R2=0.99), and temperature with an RMSE of 0.0265 °C (R2=1). At the time of writing, there is no commercially available instrument that can perform these measurements simultaneously.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":0.8,"publicationDate":"2024-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141669752","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-07-08DOI: 10.5194/jsss-13-157-2024
Pongsak Sarapukdee, Dirk Schulz, Stefan Palzer
Abstract. Surface plasmon resonance (SPR) sensors offer the possibility of label-free analysis of biosamples. The long-term stability of standard approaches is limited due to degradation of the grating upon contact with the analyte, and strategies to improve the performance in this regard include the use of so-called inverted configurations. By exciting surface plasmons from the back side of the grating, this design overcomes limitations of traditional grating-based SPR sensors caused by direct contact with the analyte medium and offers new design possibilities for implementing microfluidic analytical systems. Here a simulation for optimizing design parameters and a corresponding microfabrication technology to create the inverted grating are presented. An experimental evaluation of surface plasmon excitation and sensitivity enhancement demonstrates the feasibility of the approach. While the observed coupling effect of inverted grating structures is not as strong as the conventional configuration, it offers benefits like preventing surface oxidation, enabling repeated usage and new concepts for biosample processing.
{"title":"Concept, simulation, and fabrication of inverted grating structures for surface plasmon resonance sensors","authors":"Pongsak Sarapukdee, Dirk Schulz, Stefan Palzer","doi":"10.5194/jsss-13-157-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-157-2024","url":null,"abstract":"Abstract. Surface plasmon resonance (SPR) sensors offer the possibility of label-free analysis of biosamples. The long-term stability of standard approaches is limited due to degradation of the grating upon contact with the analyte, and strategies to improve the performance in this regard include the use of so-called inverted configurations. By exciting surface plasmons from the back side of the grating, this design overcomes limitations of traditional grating-based SPR sensors caused by direct contact with the analyte medium and offers new design possibilities for implementing microfluidic analytical systems. Here a simulation for optimizing design parameters and a corresponding microfabrication technology to create the inverted grating are presented. An experimental evaluation of surface plasmon excitation and sensitivity enhancement demonstrates the feasibility of the approach. While the observed coupling effect of inverted grating structures is not as strong as the conventional configuration, it offers benefits like preventing surface oxidation, enabling repeated usage and new concepts for biosample processing.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":0.8,"publicationDate":"2024-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141670042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-06-04DOI: 10.5194/jsss-13-135-2024
N. Ben Messaoud, M. D. Dos Santos, Begoña Espiña, Raquel B. Queirós
Abstract. A simple, reusable and sensitive electrochemical sensor based on a gold screen-printed electrode modified with silver nanoparticles has been developed for the detection of nitrate in water. Scanning electron microscopy, square wave voltammetry and electrochemical impedance spectroscopy were used to characterize the modification of the electrode surface. The modified electrode with different silver nanoparticle loadings was also tested, as well as the influence of scan rate on the reduction of nitrate. The sensor exhibited a wide linear response to nitrate from 100 to 1500 µM and a detection limit of 7.7 µM, which is significantly less than the maximum contaminant level admitted in drinking water (800 µM). The reproducibility, repeatability and selectivity of the sensor have also been examined. The suitability of the proposed sensor for real sample detection was successfully demonstrated via recovery studies performed in spiked tap water samples. The proposed approach was used to determine nitrate in freshwater, and the results were in good agreement with those obtained from a commercial nitrate sensor. These advantages make the developed sensor a promising alternative approach for integration into an online monitoring system for water monitoring.
{"title":"Development of electrochemical sensors based on silver nanoparticles electrodeposited on gold screen-printed electrodes: application to nitrate trace analysis in water","authors":"N. Ben Messaoud, M. D. Dos Santos, Begoña Espiña, Raquel B. Queirós","doi":"10.5194/jsss-13-135-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-135-2024","url":null,"abstract":"Abstract. A simple, reusable and sensitive electrochemical sensor based on a gold screen-printed electrode modified with silver nanoparticles has been developed for the detection of nitrate in water. Scanning electron microscopy, square wave voltammetry and electrochemical impedance spectroscopy were used to characterize the modification of the electrode surface. The modified electrode with different silver nanoparticle loadings was also tested, as well as the influence of scan rate on the reduction of nitrate. The sensor exhibited a wide linear response to nitrate from 100 to 1500 µM and a detection limit of 7.7 µM, which is significantly less than the maximum contaminant level admitted in drinking water (800 µM). The reproducibility, repeatability and selectivity of the sensor have also been examined. The suitability of the proposed sensor for real sample detection was successfully demonstrated via recovery studies performed in spiked tap water samples. The proposed approach was used to determine nitrate in freshwater, and the results were in good agreement with those obtained from a commercial nitrate sensor. These advantages make the developed sensor a promising alternative approach for integration into an online monitoring system for water monitoring.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2024-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141267254","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-06-04DOI: 10.5194/jsss-13-123-2024
Miguel-David Méndez-Bohórquez, S. Schramm, R. Schmoll, Andreas Kroll
Abstract. Infrared thermal imaging enables fast, accurate and non-contact measurement of temperature distributions. However, 2D representations of 3D objects often require several images to provide significant information. For such cases, 3D thermograms allow a quick temporal and spatial analysis. In this paper, the integration of an industrial high-precision 3D sensor into a 3D thermography system is presented. The performances of the existing and new systems are assessed and compared by analyzing 3D thermograms of an industry-related test object. The geometry of the obtained point cloud is evaluated by means of a non-referenced point cloud quality assessment approach. It is shown that, in the presence of the spatial resolution and the local curvature, the proposed system performs significantly better than the existing one.
摘要红外热成像技术可以快速、准确和非接触式地测量温度分布。然而，三维物体的二维表示通常需要多幅图像才能提供重要信息。在这种情况下，三维热图可以快速进行时间和空间分析。本文介绍了如何将工业用高精度 3D 传感器集成到 3D 热成像系统中。通过分析工业相关测试对象的三维热图，对现有系统和新系统的性能进行了评估和比较。通过非参考点云质量评估方法，对所获得点云的几何形状进行了评估。结果表明，在存在空间分辨率和局部曲率的情况下，拟议系统的性能明显优于现有系统。
{"title":"Integration and evaluation of the high-precision MotionCam-3D into a 3D thermography system","authors":"Miguel-David Méndez-Bohórquez, S. Schramm, R. Schmoll, Andreas Kroll","doi":"10.5194/jsss-13-123-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-123-2024","url":null,"abstract":"Abstract. Infrared thermal imaging enables fast, accurate and non-contact measurement of temperature distributions. However, 2D representations of 3D objects often require several images to provide significant information. For such cases, 3D thermograms allow a quick temporal and spatial analysis. In this paper, the integration of an industrial high-precision 3D sensor into a 3D thermography system is presented. The performances of the existing and new systems are assessed and compared by analyzing 3D thermograms of an industry-related test object. The geometry of the obtained point cloud is evaluated by means of a non-referenced point cloud quality assessment approach. It is shown that, in the presence of the spatial resolution and the local curvature, the proposed system performs significantly better than the existing one.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2024-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141267644","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-05-22DOI: 10.5194/jsss-13-109-2024
J. Grundmann, Bernd Bodermann, Elena Ermilova, Matthias Weise, Andreas Hertwig, Petr Klapetek, Jila Rafighdoost, Silvania F. Pereira
Abstract. In power electronics, compound semiconductors with large bandgaps, like silicon carbide (SiC), are increasingly being used as material instead of silicon. They have a lot of advantages over silicon but are also intolerant of nanoscale material defects, so that a defect inspection with high accuracy is needed. The different defect types on SiC samples are measured with various measurement methods, including optical and tactile methods. The defect types investigated include carrots, particles, polytype inclusions and threading dislocations, and they are analysed with imaging ellipsometry, coherent Fourier scatterometry (CFS), white light interference microscopy (WLIM) and atomic force microscopy (AFM). These different measurement methods are used to investigate which method is most sensitive for which type of defect to be able to use the measurement methods more effectively. It is important to be able to identify the defects to classify them as critical or non-critical for the functionality of the end product. Once these investigations have been completed, the measurement systems can be optimally distributed to the relevant defects in further work to realize a hybrid analysis of the defects. In addition to the identification and classification of defects, such a future hybrid analysis could also include characterizations, e.g. further evaluation of ellipsometric data by using numerical simulations.
摘要。在电力电子领域，碳化硅（SiC）等具有大带隙的化合物半导体正越来越多地被用作替代硅的材料。与硅相比，碳化硅具有很多优点，但也不能容忍纳米级的材料缺陷，因此需要高精度的缺陷检测。我们采用各种测量方法，包括光学和触觉方法，对 SiC 样品上的不同缺陷类型进行了测量。调查的缺陷类型包括胡萝卜、颗粒、多型夹杂物和穿线位错，并通过成像椭偏仪、相干傅里叶散射仪 (CFS)、白光干涉显微镜 (WLIM) 和原子力显微镜 (AFM) 进行分析。利用这些不同的测量方法来研究哪种方法对哪种类型的缺陷最敏感，以便更有效地使用这些测量方法。重要的是，要能够识别缺陷，并将其划分为对最终产品功能至关重要或不重要的类别。一旦完成这些调查，就可以在进一步的工作中将测量系统最优化地分配到相关缺陷上，从而实现对缺陷的混合分析。除了对缺陷进行识别和分类外，这种未来的混合分析还可以包括特征描述，例如通过使用数值模拟对椭偏仪数据进行进一步评估。
{"title":"Optical and tactile measurements on SiC sample defects","authors":"J. Grundmann, Bernd Bodermann, Elena Ermilova, Matthias Weise, Andreas Hertwig, Petr Klapetek, Jila Rafighdoost, Silvania F. Pereira","doi":"10.5194/jsss-13-109-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-109-2024","url":null,"abstract":"Abstract. In power electronics, compound semiconductors with large bandgaps, like silicon carbide (SiC), are increasingly being used as material instead of silicon. They have a lot of advantages over silicon but are also intolerant of nanoscale material defects, so that a defect inspection with high accuracy is needed. The different defect types on SiC samples are measured with various measurement methods, including optical and tactile methods. The defect types investigated include carrots, particles, polytype inclusions and threading dislocations, and they are analysed with imaging ellipsometry, coherent Fourier scatterometry (CFS), white light interference microscopy (WLIM) and atomic force microscopy (AFM). These different measurement methods are used to investigate which method is most sensitive for which type of defect to be able to use the measurement methods more effectively. It is important to be able to identify the defects to classify them as critical or non-critical for the functionality of the end product. Once these investigations have been completed, the measurement systems can be optimally distributed to the relevant defects in further work to realize a hybrid analysis of the defects. In addition to the identification and classification of defects, such a future hybrid analysis could also include characterizations, e.g. further evaluation of ellipsometric data by using numerical simulations.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141109046","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Gregor Scholz, Ling Yang, Markus Schake, I. Fortmeier
Abstract. Accurate and flexible form measurements for aspherical and freeform surfaces are in high demand, and non-null-test interferometric methods such as tilted-wave interferometry have gained attention as a promising response to this need. Interferometric methods, however, display ambiguities between the measurement of certain form errors and the misalignment of the measured specimen. Therefore, improved knowledge of the absolute measurement position of the specimen in relation to the interferometer setup may improve the form measurement result. In this work, we propose a concept that uses a white light interferometer to measure the absolute distance between a transparent specimen's surface and the interferometer's objective and present preparatory data to qualify the white light interferometer for the improvement of tilted-wave interferometer measurements.
{"title":"Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer","authors":"Gregor Scholz, Ling Yang, Markus Schake, I. Fortmeier","doi":"10.5194/jsss-13-89-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-89-2024","url":null,"abstract":"Abstract. Accurate and flexible form measurements for aspherical and freeform surfaces are in high demand, and non-null-test interferometric methods such as tilted-wave interferometry have gained attention as a promising response to this need. Interferometric methods, however, display ambiguities between the measurement of certain form errors and the misalignment of the measured specimen. Therefore, improved knowledge of the absolute measurement position of the specimen in relation to the interferometer setup may improve the form measurement result. In this work, we propose a concept that uses a white light interferometer to measure the absolute distance between a transparent specimen's surface and the interferometer's objective and present preparatory data to qualify the white light interferometer for the improvement of tilted-wave interferometer measurements.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2024-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140975302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Frank Leinenbach, Christopher Stumm, Fabian Krieg, Aaron Schneider
Abstract. To achieve added value from data spaces and data sets in general, an essential condition is to ensure the high quality of the stored information and its continuous availability. Nondestructive evaluation (NDE) processes represent an information source with potential for reuse. These provide essential information for the evaluation and characterization of materials and components. This information, along with others such as process parameters, is a valuable resource for data-driven added value, e.g., for process optimization or as training data for artificial intelligence (AI) applications. However, this use requires the continuous availability of NDE data sets as well as their structuring and readability. This paper describes the steps necessary to realize an NDE data cycle from the generation of information to the reuse of data.
{"title":"Information reuse of nondestructive evaluation (NDE) data sets","authors":"Frank Leinenbach, Christopher Stumm, Fabian Krieg, Aaron Schneider","doi":"10.5194/jsss-13-99-2024","DOIUrl":"https://doi.org/10.5194/jsss-13-99-2024","url":null,"abstract":"Abstract. To achieve added value from data spaces and data sets in general, an essential condition is to ensure the high quality of the stored information and its continuous availability. Nondestructive evaluation (NDE) processes represent an information source with potential for reuse. These provide essential information for the evaluation and characterization of materials and components. This information, along with others such as process parameters, is a valuable resource for data-driven added value, e.g., for process optimization or as training data for artificial intelligence (AI) applications. However, this use requires the continuous availability of NDE data sets as well as their structuring and readability. This paper describes the steps necessary to realize an NDE data cycle from the generation of information to the reuse of data.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2024-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140972338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：