{"title":"Review of flexible microelectromechanical system sensors and devices","authors":"Xiaopeng Yang, Menglun Zhang","doi":"10.1063/10.0004301","DOIUrl":null,"url":null,"abstract":"Today, the vast majority of microelectromechanical system (MEMS) sensors are mechanically rigid and therefore suffer from disadvantages when used in intimately wearable or bio-integrated applications. By applying new engineering strategies, mechanically bendable and stretchable MEMS devices have been successfully demonstrated. This article reviews recent progress in this area, focusing on high-performance flexible devices based on inorganic thin films. We start with the common design and fabrication strategies for flexibility and stretchability, summarize the recent application-oriented flexible devices, and conclude with criteria and opportunities for the future development of flexible MEMS sensors.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":null,"pages":null},"PeriodicalIF":3.5000,"publicationDate":"2021-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1063/10.0004301","citationCount":"27","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1063/10.0004301","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 27
Abstract
Today, the vast majority of microelectromechanical system (MEMS) sensors are mechanically rigid and therefore suffer from disadvantages when used in intimately wearable or bio-integrated applications. By applying new engineering strategies, mechanically bendable and stretchable MEMS devices have been successfully demonstrated. This article reviews recent progress in this area, focusing on high-performance flexible devices based on inorganic thin films. We start with the common design and fabrication strategies for flexibility and stretchability, summarize the recent application-oriented flexible devices, and conclude with criteria and opportunities for the future development of flexible MEMS sensors.
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