Experimental study on the fracture behavior variation of the Au stud bump bonding with different high temperature storage times

IF 0.7 4区 工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Microelectronics International Pub Date : 2023-04-17 DOI:10.1108/mi-12-2022-0203
Xiangou Zhang, Yuexing Wang, Xiangyu Sun, Zejia Deng, Y. Pu, Ping Zhang, Zhiyong Huang, Quanfeng Zhou
{"title":"Experimental study on the fracture behavior variation of the Au stud bump bonding with different high temperature storage times","authors":"Xiangou Zhang, Yuexing Wang, Xiangyu Sun, Zejia Deng, Y. Pu, Ping Zhang, Zhiyong Huang, Quanfeng Zhou","doi":"10.1108/mi-12-2022-0203","DOIUrl":null,"url":null,"abstract":"\nPurpose\nAu stud bump bonding technology is an effective means to realize heterogeneous integration of commercial chips in the 2.5D electronic packaging. The purpose of this paper is to study the long-term reliability of the Au stud bump treated by four different high temperature storage times (200°C for 0, 100, 200 and 300 h).\n\n\nDesign/methodology/approach\nThe bonding strength and the fracture behavior are investigated by chip shear test. The experiment is further studied by microstructural characterization approaches such as scanning electron microscope, energy dispersive spectrometer and so on.\n\n\nFindings\nIt is recognized that there were mainly three typical fracture models during the chip shear test among all the Au stud bump samples treated by high temperature storage. For solder bump before aging, the fracture occurred at the interface between the Cu pad and the Au stud bump. As the aging time increased, the fracture mainly occurred inside the Au stud bump at 200°C for 100 and 200 h. When aging time increased to 300 h, it is found that the fracture transferred to the interface between the Au stud bump and the Al Pad.\n\n\nOriginality/value\nIn addition, the bonding strength also changed with the high temperature storage time increasing. The bonding strength does not change linearly with the high temperature storage time increasing but decreases first and then increases. The investigation shows that the formation of the intermetallic compounds because of the reaction between the Au and Al atoms plays a key role on the bonding strength and fracture behavior variation.\n","PeriodicalId":49817,"journal":{"name":"Microelectronics International","volume":null,"pages":null},"PeriodicalIF":0.7000,"publicationDate":"2023-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics International","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1108/mi-12-2022-0203","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
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Abstract

Purpose Au stud bump bonding technology is an effective means to realize heterogeneous integration of commercial chips in the 2.5D electronic packaging. The purpose of this paper is to study the long-term reliability of the Au stud bump treated by four different high temperature storage times (200°C for 0, 100, 200 and 300 h). Design/methodology/approach The bonding strength and the fracture behavior are investigated by chip shear test. The experiment is further studied by microstructural characterization approaches such as scanning electron microscope, energy dispersive spectrometer and so on. Findings It is recognized that there were mainly three typical fracture models during the chip shear test among all the Au stud bump samples treated by high temperature storage. For solder bump before aging, the fracture occurred at the interface between the Cu pad and the Au stud bump. As the aging time increased, the fracture mainly occurred inside the Au stud bump at 200°C for 100 and 200 h. When aging time increased to 300 h, it is found that the fracture transferred to the interface between the Au stud bump and the Al Pad. Originality/value In addition, the bonding strength also changed with the high temperature storage time increasing. The bonding strength does not change linearly with the high temperature storage time increasing but decreases first and then increases. The investigation shows that the formation of the intermetallic compounds because of the reaction between the Au and Al atoms plays a key role on the bonding strength and fracture behavior variation.
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不同高温储存时间Au柱-凸块键合断裂行为变化的实验研究
目的Au凸点键合技术是实现商用芯片在2.5D电子封装中异构集成的有效手段。本文的目的是研究Au柱形凸块在四种不同的高温储存时间(200°C,0、100、200和300 h)下的长期可靠性。设计/方法/方法通过切屑剪切试验研究了其结合强度和断裂行为。通过扫描电子显微镜、能谱仪等微观结构表征方法对实验进行了进一步的研究。对于老化前的焊料凸块,断裂发生在Cu焊盘和Au柱凸块之间的界面处。随着时效时间的增加,断裂主要发生在200°C下100和200小时的Au柱形凸块内部。当时效时间增加到300小时时,发现断裂转移到Au柱状凸块和Al焊盘之间的界面。原始性/值。此外,结合强度也随着高温储存时间的增加而变化。结合强度不随高温储存时间的增加而线性变化,而是先降低后增加。研究表明,由于Au和Al原子之间的反应而形成的金属间化合物对结合强度和断裂行为的变化起着关键作用。
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来源期刊
Microelectronics International
Microelectronics International 工程技术-材料科学:综合
CiteScore
1.90
自引率
9.10%
发文量
28
审稿时长
>12 weeks
期刊介绍: Microelectronics International provides an authoritative, international and independent forum for the critical evaluation and dissemination of research and development, applications, processes and current practices relating to advanced packaging, micro-circuit engineering, interconnection, semiconductor technology and systems engineering. It represents a current, comprehensive and practical information tool. The Editor, Dr John Atkinson, welcomes contributions to the journal including technical papers, research papers, case studies and review papers for publication. Please view the Author Guidelines for further details. Microelectronics International comprises a multi-disciplinary study of the key technologies and related issues associated with the design, manufacture, assembly and various applications of miniaturized electronic devices and advanced packages. Among the broad range of topics covered are: • Advanced packaging • Ceramics • Chip attachment • Chip on board (COB) • Chip scale packaging • Flexible substrates • MEMS • Micro-circuit technology • Microelectronic materials • Multichip modules (MCMs) • Organic/polymer electronics • Printed electronics • Semiconductor technology • Solid state sensors • Thermal management • Thick/thin film technology • Wafer scale processing.
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