Phase Composition of Samarium Niobate and Tantalate Thin Films Prepared by Sol-Gel Method

Q4 Materials Science Powder Metallurgy Progress Pub Date : 2017-12-01 DOI:10.1515/pmp-2017-0002
H. Brunckova, Ľ. Medvecký, E. Múdra, A. Kovalčíková, J. Ďurišin, M. Sebek, V. Girman
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引用次数: 1

Abstract

Abstract Samarium niobate SmNbO4 (SNO) and tantalate SmTaO4 (STO) thin films (~100 nm) were prepared by sol-gel/spin-coating process on alumina substrates with PZT interlayer and annealing at 1000°C. The precursors of films were synthesized using Nb or Ta tartrate complexes. The improvement of the crystallinity of monoclinic M′-SmTaO4 phase via heating was observed through the coexistence of small amounts of tetragonal T-SmTa7O19 phase in STO precursor at 1000°C. The XRD results of SNO and STO films confirmed monoclinic M-SmNbO4 and M′-SmTaO4 phases, respectively, with traces of orthorhombic O-SmNbO4 (in SNO). In STO film, the single monoclinic M′-SmTaO4 phase was revealed. The surface morphology and topography of thin films were investigated by SEM and AFM analysis. STO film was smoother with roughness 3.2 nm in comparison with SNO (6.3 nm). In the microstructure of SNO film, small spherical (~50 nm) and larger cuboidal particles (~100 nm) of the SmNbO4 phase were observed. In STO, compact clusters composed of fine spherical SmTaO4 particles (~20-50 nm) were found. Effect of samarium can contribute to the formation different polymorphs of these films for the application to environmental electrolytic thin film devices.
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溶胶-凝胶法制备铌酸钐和钽酸盐薄膜的相组成
摘要采用溶胶-凝胶/旋涂法在具有PZT夹层的氧化铝衬底上制备了铌酸钐SmNbO4(SNO)和钽酸盐SmTaO4(STO)薄膜(~100nm)。使用Nb或Ta酒石酸盐配合物合成了薄膜的前体。通过在1000°C下STO前驱体中存在少量四方T-SmTa7O19相,观察到单斜M′-SmTaO4相的结晶度通过加热而提高。SNO和STO薄膜的XRD结果分别证实了单斜的M-SmNbO4和M′-SmTaO4相,以及微量的正交O-SmNbO4(在SNO中)。在STO薄膜中,发现了单斜的M′-SmTaO4相。用扫描电镜和原子力显微镜分析了薄膜的表面形貌。STO膜比SNO(6.3nm)更光滑,粗糙度为3.2nm。在SNO膜的微观结构中,观察到SmNbO4相的小球形(~50nm)和大立方体颗粒(~100nm)。在STO中,发现了由球形SmTaO4颗粒(~20-50nm)组成的致密团簇。钐的作用有助于形成这些膜的不同多晶型,用于环境电解薄膜器件。
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Powder Metallurgy Progress
Powder Metallurgy Progress Materials Science-Metals and Alloys
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