Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applications

IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Micro and Nano Systems Letters Pub Date : 2020-11-09 DOI:10.1186/s40486-020-00124-x
Natalie Worapattrakul, Andreas Tatzel, Volker Viereck, Hartmut Hillmer
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Abstract

We present a method to fabricate planar metal layers to be used as micromachined mirrors. Released mirrors of pure metal involve severe stress and reveal specific challenges to obtain planar mirror structures. Introducing sub-structures generating corrugated patterns, the metal mirror layers can be mechanically stabilized and undesired mirror bending can be reduced. For our investigations we used different arrangements of line structures on our metal mirrors, such as a group of straight or curved lines oriented differently. Comparing all the implemented different designs, planar micromirrors were achieved via sub-structures with a combination of straight lines arranged orthogonally to a single line. These planar micromirrors allow steering of the incident light by reflection and adjustment of the window transmittance. The presented low-cost method is suitable for large area fabrication of micromirror arrays, but also can be customized for other applications, where planar free-standing metal layers are required.

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平面独立金属层制造:实现用于光导向应用的微镜阵列的子结构
提出了一种用于微加工镜面的平面金属层的制备方法。释放的纯金属反射镜涉及到严重的应力,并揭示了获得平面反射镜结构的特殊挑战。引入产生波纹图案的子结构,金属镜面层可以机械稳定,并且可以减少不希望的镜面弯曲。在我们的研究中,我们在金属镜子上使用了不同排列的线结构,例如一组直线或弯曲的不同方向的线。比较所有实现的不同设计,平面微镜是通过与单线垂直排列的直线组合的子结构实现的。这些平面微镜可以通过反射和调整窗口透光率来控制入射光。提出的低成本方法适用于微镜阵列的大面积制造,但也可以定制用于需要平面独立金属层的其他应用。
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来源期刊
Micro and Nano Systems Letters
Micro and Nano Systems Letters Engineering-Biomedical Engineering
CiteScore
10.60
自引率
5.60%
发文量
16
审稿时长
13 weeks
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