Scalable, Lithography-Free Plasmonic Metasurfaces by Nano-Patterned/Sculpted Thin Films for Biosensing

G. López-Muñoz, Armando Cortés‐Reséndiz, J. Ramón‐Azcón, A. Rydosz
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引用次数: 3

Abstract

Scientific research in plasmonic metasurfaces has been widely widespread in the last years, motivated by the recent advances in the nanofabrication field and the increasing demand for high throughput sensing platforms. The recent advances in electronics, microfluidics, and signal processing have enabled the complete development of highly integrated devices with broad application potential. However, the progress observed from a fabrication point of view has been remarkable, led by the potential benefits metamaterials can offer in plasmonic sensing: sensor miniaturization, multiplexing opportunities, and extreme sensitivity biodetection. Although conventional top-down approaches, i.e., electron-beam lithography, have been extensively employed to develop plasmonic metasurfaces for biosensing, lithography-free bottom-up nanofabrication strategies based on nano-patterned/sculpted thin-films are candidates to surpass the limitations of top-down lithographic techniques with large-scale and high-throughput fabrication processes for 2D and 3D plasmonic metasurfaces over a broad material set. This perspective paper focuses on the challenges and opportunities to achieve lithography-free plasmonic metasurfaces by nano-patterned/sculpted thin films to conduct scalable and high-throughput plasmonic metamaterials for sensitive biosensing platforms.
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生物传感用纳米图案/雕刻薄膜的可扩展、无光刻等离子体超表面
近年来,由于纳米制造领域的最新进展和对高通量传感平台的日益增长的需求,等离子体元表面的科学研究得到了广泛的应用。电子、微流体和信号处理领域的最新进展使具有广泛应用潜力的高度集成器件得以全面开发。然而,从制造的角度观察到的进展是显著的,超材料在等离子体传感中可以提供的潜在好处是:传感器小型化、多路复用机会和极端灵敏度的生物检测。尽管传统的自上而下的方法,即电子束光刻,已经被广泛用于开发用于生物传感的等离子体元表面,基于纳米图案化/雕刻薄膜的无光刻自下而上的纳米制造策略有望超越自上而下的光刻技术的局限性,在广泛的材料集上为2D和3D等离子体元表面提供大规模和高通量的制造工艺。这篇前瞻性论文聚焦于通过纳米图案化/雕刻薄膜实现无光刻等离子体超表面的挑战和机遇,以传导用于敏感生物传感平台的可扩展和高通量等离子体超材料。
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