Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor

IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Micro and Nano Systems Letters Pub Date : 2017-09-12 DOI:10.1186/s40486-017-0060-z

Jun-gu Kang, Joon-Shik Park, Kwang-Bum Park, Junho Shin, Eung-An Lee, Sangsoo Noh, Hoo-Jeong Lee

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引用次数: 22

Abstract

Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T₂?=?6.466R₁–642.8, where T₂?=?temperature of the Pt micro heater and R₁?=?the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25?ppm CO and 1?ppm HCHO gases were characterized.

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用铂薄膜温度传感器嵌入微气体传感器控制微加热器的温度

Pt薄膜温度传感器(Pt T传感器)嵌入在微型气体传感器中，用于测量和控制工作温度。利用焦耳加热方法，对Pt - T传感器和微加热器的电阻随温度变化进行了表征。为了提高Pt T传感器测温的精度，我们研究了Pt T传感器、微加热器和工作温度之间的相关性，其线性比例关系为:T2?= 6.466R1-642.8，其中T2?=?Pt微加热器的温度和R1?=?Pt T传感器的电阻。由于Pt T传感器与微加热器之间的误差被物理隔离，因此可以通过Pt T传感器测量和控制微气体传感器中微加热器的温度。对于Pt - T传感器在微气体传感器中的实际应用，制备的微气体传感器的气敏性能达到25?ppm CO和1?对ppm HCHO气体进行了表征。

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