Design, characterization and applications of direct current plasma source

Abstract

In this paper, the construction, and operation of a locally design cold plasma reactor are described. The anode diameter effect is studied in three inner diameters 5 mm, 10 mm, and 15 mm. This effect on the discharge and plasma characteristics is studied using oxygen and argon gases. It was found that the optimum diameter is 10 mm. Moreover, the plasma density and temperature are investigated using a cylindrical Langmuir probe at the optimum diameter. It is found that the electron temperature reaches 1.6 eV and the electron density reaches 2.3x108 cm−3 in the case of oxygen gas. On the other hand the X-ray diffraction (XRD), scanning electron microscope (SEM) and Fourier-transform infrared spectroscopy (FTIR) analysis are used for chractrized the manganese cobalt doped ferrite (Mn0.5Co0.5Fe2O4) nanoparticles sample before and after oxygen plasma irradiation. The obtained results showed that cold plasma reactor is constructed with high efficiency to meet the required applications such as surface modification, plasma deposition and etching.