Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors

IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Micro and Nano Systems Letters Pub Date : 2020-12-14 DOI:10.1186/s40486-020-00127-8
Dong Hwan Kim, Young Jung, Kyungkuk Jung, Dong Hwa Kwak, Dong Min Park, Myung Gyu Shin, Hyeong Jun Tak, Jong Soo Ko
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引用次数: 13

Abstract

We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (>?86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.

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中空聚二甲基硅氧烷(PDMS)泡沫,具有3D互连网络,用于高灵敏度电容压力传感器
我们提出了一种具有三维网络结构的中空聚二甲基硅氧烷(PDMS)泡沫材料制成的高灵敏度电容式压力传感器。泡沫的刚度由PDMS溶液的粘度来调节。制备的PDMS-30 (PDMS 30 wt%)泡沫具有极高的孔隙率(>?86%),约为裸PDMS (PDMS 100 wt%)泡沫的19倍。使用泡沫制成的电容式压力传感器具有高灵敏度,良好的压缩性(高达80%的应变),并且在2000次循环测试中具有一致的输出特性。
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来源期刊
Micro and Nano Systems Letters
Micro and Nano Systems Letters Engineering-Biomedical Engineering
CiteScore
10.60
自引率
5.60%
发文量
16
审稿时长
13 weeks
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