Quality-Factor Enhancing Locations for Substrate Mounted Resonators

IF 0.8 4区 工程技术 Q4 ACOUSTICS International Journal of Acoustics and Vibration Pub Date : 2020-09-30 DOI:10.20855/ijav.2020.25.31597
A. Anilkumar, Arun George, Gireesh Sharma N.
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引用次数: 1

Abstract

An important but often overlooked factor that affects the performance of a meso/micro electro mechanical vibratory sensor is the structural interaction between the sensor’s resonator and the substrate on which it is mounted. Situating resonators at node points eliminates this interaction and thereby helps to improve a resonator’s quality-factor for a particular mode of vibration. This paper addresses the problem of locating a single degree of freedom springmass resonator on a generic cantilever substrate. The loci of natural frequencies obtained when the resonator’s mounting location is varied are developed, and the nodal locations are identified. Thereafter a method to obtain these locations from the characteristic equation without solving the associated eigenvalue problem is described. Lookup tables detailing the nodal locations and the corresponding natural frequencies for various resonator parameters are presented. It is found that at these special nodal locations, the magnitude of the power transmitted through anchors is negligible, which ensures minimal structural interaction between the resonator and the substrate.
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衬底安装谐振器的质量因数增强位置
影响中/微机电振动传感器性能的一个重要但经常被忽视的因素是传感器谐振器与其所安装的基板之间的结构相互作用。将谐振器放置在节点处可以消除这种相互作用,从而有助于提高谐振器在特定振动模式下的质量因子。本文解决了在一般悬臂基底上定位单自由度弹簧质量谐振器的问题。研究了谐振器安装位置变化时的固有频率轨迹,并确定了节点位置。在此基础上,提出了一种不用求解相关特征值问题就能从特征方程中得到这些位置的方法。给出了各种谐振器参数的节点位置和相应的固有频率的查找表。研究发现,在这些特殊的节点位置,通过锚点传输的功率大小可以忽略不计,这确保了谐振器和衬底之间的结构相互作用最小。
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来源期刊
International Journal of Acoustics and Vibration
International Journal of Acoustics and Vibration ACOUSTICS-ENGINEERING, MECHANICAL
CiteScore
1.60
自引率
10.00%
发文量
0
审稿时长
12 months
期刊介绍: The International Journal of Acoustics and Vibration (IJAV) is the refereed open-access journal of the International Institute of Acoustics and Vibration (IIAV). The IIAV is a non-profit international scientific society founded in 1995. The primary objective of the Institute is to advance the science of acoustics and vibration by creating an international organization that is responsive to the needs of scientists and engineers concerned with acoustics and vibration problems all around the world. Manuscripts of articles, technical notes and letters-to-the-editor should be submitted to the Editor-in-Chief via the on-line submission system. Authors wishing to submit an article need to log in on the IJAV website first. Users logged into the website are able to submit new articles, track the status of their articles already submitted, upload revised articles, responses and/or rebuttals to reviewers, figures, biographies, photographs, copyright transfer agreements, and send comments to the editor. Each time the status of an article submitted changes, the author will also be notified automatically by email. IIAV members (in good standing for at least six months) can publish in IJAV free of charge and their papers will be displayed on-line immediately after they have been edited and laid-out. Non-IIAV members will be required to pay a mandatory Article Processing Charge (APC) of $200 USD if the manuscript is accepted for publication after review. The APC fee allows IIAV to make your research freely available to all readers using the Open Access model. In addition, Non-IIAV members who pay an extra voluntary publication fee (EVPF) of $500 USD will be granted expedited publication in the IJAV Journal and their papers can be displayed on the Internet after acceptance. If the $200 USD (APC) publication fee is not honored, papers will not be published. Authors who do not pay the voluntary fixed fee of $500 USD will have their papers published but there may be a considerable delay. The English text of the papers must be of high quality. If the text submitted is of low quality the manuscript will be more than likely rejected. For authors whose first language is not English, we recommend having their manuscripts reviewed and edited prior to submission by a native English speaker with scientific expertise. There are many commercial editing services which can provide this service at a cost to the authors.
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