Sputter-Deposited Mo Thin Films: Multimodal Characterization of Structure, Surface Morphology, Density, Residual Stress, Electrical Resistivity, and Mechanical Response

IF 2.5 3区 材料科学 Q3 ENGINEERING, MANUFACTURING Integrating Materials and Manufacturing Innovation Pub Date : 2023-04-24 DOI:10.1007/s40192-023-00297-4
M. Kalaswad, J. Custer, S. Addamane, R. M. Khan, L. Jauregui, T. Babuska, A. Henriksen, F. DelRio, R. Dingreville, B. Boyce, D. Adams
{"title":"Sputter-Deposited Mo Thin Films: Multimodal Characterization of Structure, Surface Morphology, Density, Residual Stress, Electrical Resistivity, and Mechanical Response","authors":"M. Kalaswad, J. Custer, S. Addamane, R. M. Khan, L. Jauregui, T. Babuska, A. Henriksen, F. DelRio, R. Dingreville, B. Boyce, D. Adams","doi":"10.1007/s40192-023-00297-4","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":13604,"journal":{"name":"Integrating Materials and Manufacturing Innovation","volume":"12 1","pages":"118 - 129"},"PeriodicalIF":2.5000,"publicationDate":"2023-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Integrating Materials and Manufacturing Innovation","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1007/s40192-023-00297-4","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 1

Abstract Image

查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
溅射沉积Mo薄膜:结构、表面形貌、密度、残余应力、电阻率和机械响应的多模式表征
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
Integrating Materials and Manufacturing Innovation
Integrating Materials and Manufacturing Innovation Engineering-Industrial and Manufacturing Engineering
CiteScore
5.30
自引率
9.10%
发文量
42
审稿时长
39 days
期刊介绍: The journal will publish: Research that supports building a model-based definition of materials and processes that is compatible with model-based engineering design processes and multidisciplinary design optimization; Descriptions of novel experimental or computational tools or data analysis techniques, and their application, that are to be used for ICME; Best practices in verification and validation of computational tools, sensitivity analysis, uncertainty quantification, and data management, as well as standards and protocols for software integration and exchange of data; In-depth descriptions of data, databases, and database tools; Detailed case studies on efforts, and their impact, that integrate experiment and computation to solve an enduring engineering problem in materials and manufacturing.
期刊最新文献
MicroProcSim: A Software for Simulation of Microstructure Evolution. New Paradigms in Model Based Materials Definitions for Titanium Alloys in Aerospace Applications An Explainable Deep Learning Model Based on Multi-scale Microstructure Information for Establishing Composition–Microstructure–Property Relationship of Aluminum Alloys Comparison of Full-Field Crystal Plasticity Simulations to Synchrotron Experiments: Detailed Investigation of Mispredictions 3D Reconstruction of a High-Energy Diffraction Microscopy Sample Using Multi-modal Serial Sectioning with High-Precision EBSD and Surface Profilometry
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1