Lei Dong, A. Chandra, Kevin Wylie, Y. Nabae, T. Hayakawa
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引用次数: 0
Abstract
A facile approach to block copolymer (BCP) domain orientation control in thin films has been demonstrated by employing a BCP with liquid crystalline semifluorinated side chains by tuning the composition of the copolymers of the bottom surface layer (BSL). 1H,1H,2H,2H-Perfluorodecanethiol was attached to a precursor polymer, polystyrene-block-poly(glycidyl methacrylate) (PS-b-PGMA), to obtain a novel BCP with a C8F17-containing liquid crystal (LC) side chain (PS-b-P8FMA). Anisotropic hexagonally packed cylinder domains in a bulk state were first characterized by transmission electron microscopy (TEM) and small angle X-ray scattering (SAXS). The observed morphology transition of BCPs with different fluorinated side chain lengths of –CF3, –C4F9, and –C6F13 suggested the decisive effects of LC side chain ordering on the anisotropic nanostructures. In the thin film study, poly(methyl methacrylate-random-2,2,2-trifluoroethyl methacrylate-random-methacrylic acid) (PMMA-ran-PTFEMA-ran-PMAA) solution was used as BSLs for tuning the desired periodicities. The surface free energy (SFE) of BSL was simply tailored by changing the composition of comonomers. In atomic force microscopy (AFM) characterization, long-range ordered perpendicularly oriented BCP domains in a hexagonally packed array or parallel oriented BCP domains as striation patterns were easily fabricated on non-preferential or preferential BSL, respectively. The study presents a novel approach to tunable thin film periodicities without changing or modifying BCPs, which is desired in next-generation BCP lithography.
通过调节底部表面层(BSL)的共聚物的组成,使用具有液晶半氟化侧链的BCP,已经证明了在薄膜中控制嵌段共聚物(BCP)结构域取向的简单方法。将1H,1H,2H,2H-全氟癸硫醇连接到前体聚合物聚苯乙烯嵌段聚(甲基丙烯酸缩水甘油酯)(PS-b-PGMA)上,以获得具有含C8F17液晶(LC)侧链的新型BCP(PS-b-P8FMA)。首先用透射电子显微镜(TEM)和小角度X射线散射(SAXS)对体相各向异性六边形填充柱畴进行了表征。观察到的具有–CF3、–C4F9和–C6F13的不同氟化侧链长度的BCP的形态转变表明LC侧链有序化对各向异性纳米结构的决定性影响。在薄膜研究中,使用聚(甲基丙烯酸甲酯-丙烯酰胺-2,2,2-三氟乙基甲基丙烯酸无规甲基丙烯酸)(PMMA ran PTFEMA ran PMAA)溶液作为BSL来调节所需的周期性。通过改变共聚单体的组成,简单地调整了BSL的表面自由能。在原子力显微镜(AFM)表征中,六边形填充阵列中的长程有序垂直取向BCP畴或作为条纹图案的平行取向BCP域分别容易地在非优先或优先BSL上制造。该研究提出了一种在不改变或修改BCP的情况下实现可调薄膜周期性的新方法,这是下一代BCP光刻所需要的。
期刊介绍:
The International Journal of Polymer Science is a peer-reviewed, Open Access journal that publishes original research articles as well as review articles on the chemistry and physics of macromolecules.