Polyimide substrate textured by copper-seeding technique for enhanced light absorption in flexible black silicon

IF 0.7 4区 工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Microelectronics International Pub Date : 2022-07-15 DOI:10.1108/mi-03-2022-0038
Halo D. Omar, Auwal Abdulkadir, M. Hashim, M. Z. Pakhuruddin
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Abstract

Purpose This paper aims to present investigation on textured polyimide (PI) substrate for enhanced light absorption in flexible black silicon (bSi). Design/methodology/approach Flexible bSi with thickness of 60 µm is used in this work. To texture the PI substrate, copper-seeding technique is used. A copper (Cu) layer with a thickness of 100 nm is deposited on PI substrate by sputtering. The substrate is then annealed at 400°C in air ambient for different durations of 60, 90 and 120 min. Findings With 90 min of annealing, root mean square roughness as large as 130 nm, peak angle of 24° and angle distribution of up to 87° are obtained. With this texturing condition, the flexible bSi exhibits maximum potential short-circuit current density (Jmax) of 40.33 mA/cm2, or 0.45 mA/cm2 higher compared to the flexible bSi on planar PI. The improvement is attributed to enhanced light scattering at the flexible bSi/textured PI interface. The findings from this work demonstrate that the optimization of the PI texturing via Cu-seeding process leads to an enhancement in the long wavelengths light absorption and potential Jmax in the flexible bSi absorber. Originality/value Demonstrated enhanced light absorption and potential Jmax in flexible bSi on textured PI substrate (compared to planar PI substrate) by Cu-seeding with different annealing durations.
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柔性黑硅中增强光吸收的铜籽晶聚酰亚胺衬底
目的本文旨在研究用于增强柔性黑硅(bSi)光吸收的织构化聚酰亚胺(PI)衬底。设计/方法学/方法厚度为60的柔性bSi µm用于这项工作。为了使PI衬底纹理化,使用了铜籽晶技术。厚度为100的铜(Cu)层 nm通过溅射沉积在PI衬底上。然后在400°C的空气环境中对基板进行退火,退火时间分别为60、90和120 min.FindingsWith 90 最小退火时间,均方根粗糙度高达130 获得了24°的峰角和高达87°的角度分布。在这种织构化条件下,柔性bSi表现出40.33的最大潜在短路电流密度(Jmax) mA/cm2,或0.45 mA/cm2比平面PI上的柔性bSi高。这种改进归因于在柔性bSi/纹理PI界面处增强的光散射。这项工作的发现表明,通过Cu晶种工艺优化PI织构导致柔性bSi吸收体中长波长光吸收和电势Jmax的增强。独创性/价值通过不同退火持续时间的Cu晶种,在纹理化PI衬底上(与平面PI衬底相比)展示了柔性bSi中增强的光吸收和电势Jmax。
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来源期刊
Microelectronics International
Microelectronics International 工程技术-材料科学:综合
CiteScore
1.90
自引率
9.10%
发文量
28
审稿时长
>12 weeks
期刊介绍: Microelectronics International provides an authoritative, international and independent forum for the critical evaluation and dissemination of research and development, applications, processes and current practices relating to advanced packaging, micro-circuit engineering, interconnection, semiconductor technology and systems engineering. It represents a current, comprehensive and practical information tool. The Editor, Dr John Atkinson, welcomes contributions to the journal including technical papers, research papers, case studies and review papers for publication. Please view the Author Guidelines for further details. Microelectronics International comprises a multi-disciplinary study of the key technologies and related issues associated with the design, manufacture, assembly and various applications of miniaturized electronic devices and advanced packages. Among the broad range of topics covered are: • Advanced packaging • Ceramics • Chip attachment • Chip on board (COB) • Chip scale packaging • Flexible substrates • MEMS • Micro-circuit technology • Microelectronic materials • Multichip modules (MCMs) • Organic/polymer electronics • Printed electronics • Semiconductor technology • Solid state sensors • Thermal management • Thick/thin film technology • Wafer scale processing.
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