Demonstration of Ultraviolet μLED Array With Novel Electrical Contact Etch Mask

IF 2.2 3区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC IEEE Journal of Quantum Electronics Pub Date : 2023-09-01 DOI:10.1109/JQE.2023.3310968

Matthew Seitz;Matthew Hartensveld;Bryan Melanson;Jacob Boisvere;Jing Zhang

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引用次数: 1

Abstract

We report on the realization of a uniform array of electrically driven, individually addressable micro light-emitting diodes (

$\mu $

LEDs) with diameters of

$2.5~\mu \text{m}$

emitting at 372 nm. This highly ordered array was fabricated via a top-down fabrication approach using a novel Ni/Au/Ni structure which combines both a Ni/Au low-resistance electrical contact and durable Ni etch mask. The use of this novel structure allows individual

$\mu $

LEDs to be addressed with promising electroluminescence intensity and narrow linewidth at ultraviolet-A (UV-A) band. This improved control over

$\mu $

LED output power and emission location makes our approach an important step towards the development of high efficiency UV-A

$\mu $

LEDs for a range of applications.

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用新型电接触蚀刻掩模演示紫外μLED阵列

我们报道了在372nm处发射的直径为$2.5~\mu\text{m}$的电驱动、可单独寻址的微型发光二极管（$\mu$LED）的均匀阵列的实现。这种高度有序的阵列是通过使用新型Ni/Au/Ni结构的自上而下的制造方法制造的，该结构结合了Ni/Au低电阻电接触和耐用的Ni蚀刻掩模。这种新型结构的使用使得单个$\mu$LED能够在紫外-A（UV-A）波段以有希望的电致发光强度和窄线宽进行处理。这种对$\mu$LED输出功率和发射位置的改进控制使我们的方法成为开发用于一系列应用的高效UV-A$\mu$LED的重要一步。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Journal of Quantum Electronics 工程技术-工程：电子与电气

CiteScore

4.70

自引率

4.00%

发文量

审稿时长

3.0 months

期刊介绍： The IEEE Journal of Quantum Electronics is dedicated to the publication of manuscripts reporting novel experimental or theoretical results in the broad field of the science and technology of quantum electronics. The Journal comprises original contributions, both regular papers and letters, describing significant advances in the understanding of quantum electronics phenomena or the demonstration of new devices, systems, or applications. Manuscripts reporting new developments in systems and applications must emphasize quantum electronics principles or devices. The scope of JQE encompasses the generation, propagation, detection, and application of coherent electromagnetic radiation having wavelengths below one millimeter (i.e., in the submillimeter, infrared, visible, ultraviolet, etc., regions). Whether the focus of a manuscript is a quantum-electronic device or phenomenon, the critical factor in the editorial review of a manuscript is the potential impact of the results presented on continuing research in the field or on advancing the technological base of quantum electronics.