Effect of thickness on moisture barrier properties of aluminum oxide using ozone-based atomic layer deposition

IF 1.4 4区材料科学 Q3 MATERIALS SCIENCE, CERAMICS Journal of Ceramic Processing Research Pub Date : 2021-06-01 DOI:10.36410/JCPR.2021.22.3.253

Juhyun Lee, Seokyoon Shin, Se-Youl Kwon, Woochool Jang, Hyeongsu Choi, Hyunwoo Park, Namgue Lee, H. Jeon

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厚度对臭氧原子层沉积氧化铝防潮性能的影响

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来源期刊

Journal of Ceramic Processing Research 工程技术-材料科学：硅酸盐

CiteScore

2.00

自引率

69.20%

发文量

审稿时长

8 months

期刊介绍： The JOURNAL OF CERAMIC PROCESSING RESEARCH aims to publish original research articles covering the influence of processing routes on the microstructure and properties of ceramics and ceramic-based materials. The journal is managed by Hanyang University Press and overseen by an in-house editorial team of professional editors for a rigorous peer-review process with rapid publication.

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