Fully bulk CMOS compatible Key Shape Floating Body Memory (KFBM)

Abstract

This paper presents a capacitorless memory cell with bulk CMOS compatibility, consisting of a MOSFET with a virtual floating body formed by the trench. The name Key shape Floating Body Memory (KFBM) is derived from the resemblance of the structure to the shape of an antique key. The carrier concentration in the vertical device beneath the MOSFET results in over more than 5 orders of magnitude of the on–off cell current ratio with off-current less than 100pA/cell. The device achieves a retention time of about 1 s at 85C and over 10 s at 27C all the while maintaining high density and scalability. On the basis of TCAD simulation we have demonstrated high tolerance to disturbance (more than 1000 times with all types of signals), which has been an issue with DRAM memories. KFBM can incorporate both dynamic RAM and flash features.