Validation of the Reference Impedance in Multiline Calibration With Stepped Impedance Standards

Ziad Hatab;Michael Ernst Gadringer;Ahmad Bader Alothman Alterkawi;Wolfgang Bösch
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Abstract

This article presents a new technique for evaluating the consistency of the reference impedance in multiline thru–reflect–line (TRL) calibration. During the calibration process, it is assumed that all transmission line standards have the same characteristic impedance. However, these assumptions are prone to errors due to imperfections, which can affect the validity of the reference impedance after calibration. Our proposed method involves using multiple stepped impedance lines of different lengths to extract the broadband reflection coefficient of the impedance transition. This reflection coefficient can be used to validate the reference impedance experimentally without requiring fully defined standards. We demonstrate this method using multiline TRL based on microstrip structures on a printed circuit board (PCB) with an on-wafer probing setup.
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用阶跃阻抗标准进行多线校准时参考阻抗的验证
本文提出了一种新的技术来评估多线透反射线(TRL)校准中参考阻抗的一致性。在校准过程中,假设所有传输线标准具有相同的特性阻抗。然而,由于缺陷,这些假设容易产生误差,这可能会影响校准后参考阻抗的有效性。我们提出的方法包括使用不同长度的多条阶梯阻抗线来提取阻抗转换的宽带反射系数。该反射系数可用于通过实验验证参考阻抗,而不需要完全定义的标准。我们在带有晶圆上探测装置的印刷电路板(PCB)上使用基于微带结构的多线TRL演示了这种方法。
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