M. Kirschmann, J. Pierer, A. Steinecker, Philipp Schmid, Arne Erdmann
{"title":"Plenoptic Inspection System for Automatic Quality Control of MEMS and Microsystems","authors":"M. Kirschmann, J. Pierer, A. Steinecker, Philipp Schmid, Arne Erdmann","doi":"10.1007/978-3-030-72632-4_16","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":73328,"journal":{"name":"IFIP advances in information and communication technology","volume":"42 9","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IFIP advances in information and communication technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-030-72632-4_16","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}