{"title":"Carbon contamination of Si (111) surfaces","authors":"J.M. Charig, D.K. Skinner","doi":"10.1016/0039-6028(69)90151-4","DOIUrl":null,"url":null,"abstract":"<div><p>Auger electron spectra obtained by operating LEED optics with a modulated, swept retarding potential have been used to study cleaning of the Si (111) surface and its subsequent contamination by ethylene vapour under ultra high vacuum conditions. The results provide corroborative evidence of the importance of carbon contamination for the generation of three-dimensional growth centres during epitaxial deposition of Si by pyrolysis of silane at low pressures. The detection level for carbon by this technique has not yet been measured but it is lower than that necessary to produce a recognisable visual change in the Si (111)-7 LEED pattern. The behaviour of the carbon-containing surface layer as a function of heat treatment has been explored and an explanation for the results is given.</p></div>","PeriodicalId":22100,"journal":{"name":"Surface Science","volume":"15 2","pages":"Pages 277-285"},"PeriodicalIF":2.1000,"publicationDate":"1969-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0039-6028(69)90151-4","citationCount":"41","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Science","FirstCategoryId":"92","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0039602869901514","RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 41
Abstract
Auger electron spectra obtained by operating LEED optics with a modulated, swept retarding potential have been used to study cleaning of the Si (111) surface and its subsequent contamination by ethylene vapour under ultra high vacuum conditions. The results provide corroborative evidence of the importance of carbon contamination for the generation of three-dimensional growth centres during epitaxial deposition of Si by pyrolysis of silane at low pressures. The detection level for carbon by this technique has not yet been measured but it is lower than that necessary to produce a recognisable visual change in the Si (111)-7 LEED pattern. The behaviour of the carbon-containing surface layer as a function of heat treatment has been explored and an explanation for the results is given.
期刊介绍：
Surface Science is devoted to elucidating the fundamental aspects of chemistry and physics occurring at a wide range of surfaces and interfaces and to disseminating this knowledge fast. The journal welcomes a broad spectrum of topics, including but not limited to:
• model systems (e.g. in Ultra High Vacuum) under well-controlled reactive conditions
• nanoscale science and engineering, including manipulation of matter at the atomic/molecular scale and assembly phenomena
• reactivity of surfaces as related to various applied areas including heterogeneous catalysis, chemistry at electrified interfaces, and semiconductors functionalization
• phenomena at interfaces relevant to energy storage and conversion, and fuels production and utilization
• surface reactivity for environmental protection and pollution remediation
• interactions at surfaces of soft matter, including polymers and biomaterials.
Both experimental and theoretical work, including modeling, is within the scope of the journal. Work published in Surface Science reaches a wide readership, from chemistry and physics to biology and materials science and engineering, providing an excellent forum for cross-fertilization of ideas and broad dissemination of scientific discoveries.
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