A study on the energy performance of a cooling plant system: Air-conditioning in a semiconductor factory

IF 7.1 2区工程技术 Q1 CONSTRUCTION & BUILDING TECHNOLOGY Energy and Buildings Pub Date : 2008-01-01 DOI:10.1016/j.enbuild.2008.02.003

Young-Hak Song , Yasunori Akashi , Jurng-Jae Yee

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引用次数: 18

Abstract

This paper will focus on the energy performance evaluation of a cooling plant system in a semiconductor factory. Several energy saving technologies namely: integrated cooling towers, free cooling systems, control of the chilled water quantity, etc., have been adopted to improve efficiency of the cooling plant system. We have collected actual operating data for 2 years and evaluated the performance of chillers’ COP and the whole cooling plant system's COP and they showed satisfactory results even if the thermal load of the factory was about half compared with design phase assumption.

We also have verified each effect of the energy saving technologies through model-based simulation analysis. The annual electric power consumption dropped about 35% compared to conventional cooling plant systems in case of design phase thermal load. And the faulty status operation of the chiller's number control miss occurred while we monitored. Electric power consumption increased about 17% compared to normal status operation at the same period.

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某半导体工厂空调制冷系统的能源性能研究

本文将集中讨论半导体工厂冷却装置系统的能源性能评估。采用综合冷却塔、自由冷却系统、冷冻水量控制等节能技术，提高了冷却装置系统的效率。我们收集了2年的实际运行数据，对制冷机的COP和整个冷却厂系统的COP进行了性能评估，即使工厂的热负荷与设计阶段的假设相比约为一半，也显示出令人满意的结果。通过基于模型的仿真分析，验证了节能技术的各项效果。在设计阶段热负荷情况下，与传统冷却系统相比，年耗电量下降约35%。在监控过程中，出现了冷水机组控制失误状态运行故障。与同期正常运行相比，电力消耗增加了约17%。

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来源期刊

Energy and Buildings 工程技术-工程：土木

CiteScore

12.70

自引率

11.90%

发文量

863

审稿时长

38 days

期刊介绍： An international journal devoted to investigations of energy use and efficiency in buildings Energy and Buildings is an international journal publishing articles with explicit links to energy use in buildings. The aim is to present new research results, and new proven practice aimed at reducing the energy needs of a building and improving indoor environment quality.