Transparent Water-repellent Films Containing Fluoro-alkyl Functions by RF Plasma-enhanced CVD

Abstract

SummaryTransparent water-repellent films containing fluoro-alkyl functions were prepared on polycarbonate, glass and Si substrates by rf plasma-enhanced CVD. The vapours of the fluoro-alkyl silanes were used as raw materials. The substrate temperature during deposition was around 50°C. The films obtained had good water repellency. The maximum contact angle for a water drop was 107 degrees. The contact angles obtained depended on the number of—(CF2)—in FAS molecules. FTIR and XPS were used to investigate the film properties. The existence of the fluoro-alkyl functions CP3—,—CF2—and >CF—was confirmed at the film surfaces. The transmittance of the PC substrate was improved by the coating. These films also have a function as anti-reflective coatings.