Formation and Properties of Anodic Oxide Films of Titanium Formed under Discharge Conditions in an Electrolyte

T. Miyazaki, Toshihiko Suzuki, Genshoku Lee, S. Fujimori
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Abstract

Anodic oxidation is a popular method to deposit an oxide film on titanium with a thickness on the order of several hundred nm. In this study formation and some properties of anodic films of titanium under discharge conditions were investigated. Treated titanium specimens served as an anode in several electrolytes, and voltage was applied using the direct current power source. The discharge threshold voltage in each electrolyte decreased as the concentration of the electrolyte increased. Anodic oxidation of titanium was carried out on applying the voltage above the discharge threshold voltage, for example, at 100-130 V for a phosphoric acid solution (30 wt. %). Surface films with a thickness on the order of pm were formed by this treatment. Adhesion of the oxide film was superior when the anodic oxidation was carried out under moderate discharge conditions. SEM observations appeared the featured microscopic surface topography with many small (pm order) holes on the surface of the specimen treated by anodic oxidation under discharge conditions. X-ray diffractory analysis revealed that titanium oxides (Ti.02,1) and an amorphous anatase (Ti02) were formed by the anodic oxidation under discharge conditions.
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电解液放电条件下钛阳极氧化膜的形成及性能
阳极氧化是一种在钛上沉积氧化膜的常用方法,其厚度约为几百纳米。本文研究了放电条件下钛阳极膜的形成及其一些性能。处理后的钛试样作为几种电解质的阳极,并使用直流电源施加电压。每种电解质的放电阈值电压随电解质浓度的增加而降低。在高于放电阈值电压的电压下进行钛的阳极氧化,例如,在100-130 V的磷酸溶液中(30 wt. %)。通过这种处理,形成了厚度在pm量级的表面膜。在中等放电条件下进行阳极氧化时,氧化膜的附着力较好。在放电条件下,经阳极氧化处理的试样表面呈现出细小的微孔形貌。x射线衍射分析表明,在放电条件下阳极氧化形成钛氧化物(Ti02,1)和无定形锐钛矿(Ti02)。
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