Jeongtae Kim, Sungil Kim, Y. Joung, Jiyeon Choi, Chiwan Koo
{"title":"Two-step hybrid process of movable part inside glass substrate using ultrafast laser","authors":"Jeongtae Kim, Sungil Kim, Y. Joung, Jiyeon Choi, Chiwan Koo","doi":"10.1186/s40486-021-00142-3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":null,"pages":null},"PeriodicalIF":4.7000,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nano Systems Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1186/s40486-021-00142-3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"NANOSCIENCE & NANOTECHNOLOGY","Score":null,"Total":0}