{"title":"A Fetal-Movement Circuit Harvesting High-Energy Plasma During Fabrication, Concept, and Its Application to Self-Programming PUF","authors":"Kotaro Naruse;Takayuki Ueda;Jun Shiomi;Yoshihiro Midoh;Noriyuki Miura","doi":"10.1109/LSSC.2023.3313966","DOIUrl":null,"url":null,"abstract":"This letter presents a concept of a circuit harvesting high-energy plasma and operating during its semiconductor fabrication process, namely, fetal-movement circuit (FMC). The plasma current collection antenna is designed to be a comb shape for area saving. This enables the FMC related circuits to be placed within a dicing street for suppressing its area penalty to be almost zero. A self-programming oxide-breakdown physically unclonable function (PUF) has been implemented as one of the FMC applications. The successful PUF programming operation during fabrication has been demonstrated.","PeriodicalId":13032,"journal":{"name":"IEEE Solid-State Circuits Letters","volume":null,"pages":null},"PeriodicalIF":2.2000,"publicationDate":"2023-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/iel7/8011414/10016898/10247264.pdf","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Solid-State Circuits Letters","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/10247264/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"COMPUTER SCIENCE, HARDWARE & ARCHITECTURE","Score":null,"Total":0}
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Abstract
This letter presents a concept of a circuit harvesting high-energy plasma and operating during its semiconductor fabrication process, namely, fetal-movement circuit (FMC). The plasma current collection antenna is designed to be a comb shape for area saving. This enables the FMC related circuits to be placed within a dicing street for suppressing its area penalty to be almost zero. A self-programming oxide-breakdown physically unclonable function (PUF) has been implemented as one of the FMC applications. The successful PUF programming operation during fabrication has been demonstrated.
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