刘. L. Lu, 李艳宁 Li Yanning, 吴. W. Sen, 胡晓东 Hu Xiaodong
{"title":"Deflection angle measurement system for microstructure based on microscope optical lever","authors":"刘. L. Lu, 李艳宁 Li Yanning, 吴. W. Sen, 胡晓东 Hu Xiaodong","doi":"10.3788/GXJS20144003.0219","DOIUrl":null,"url":null,"abstract":"A microscope system for the deflection angle measurement of microstructures is presented.The microscope consists of an infinite conjugate imaging system and an integrated optical lever.The laser beam of the optical lever is focused by the infinite objective to a size less than 10μm.A current-mode circuit is designed for signal processing for the optical lever,and 5MHz in bandwidth is achieved.The measurement range and resolution of the system are±4°and 1.2″, respectively.As a test,the system is used to measure the deflection angles at the free end of a cantilever probe of atomic force microscope under step load.The measurement results are consistent well with the calculation by using Timoshenko beam theory.","PeriodicalId":35591,"journal":{"name":"光学技术","volume":"39 1","pages":"219-224"},"PeriodicalIF":0.0000,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"光学技术","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.3788/GXJS20144003.0219","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Physics and Astronomy","Score":null,"Total":0}
引用次数: 0
Abstract
A microscope system for the deflection angle measurement of microstructures is presented.The microscope consists of an infinite conjugate imaging system and an integrated optical lever.The laser beam of the optical lever is focused by the infinite objective to a size less than 10μm.A current-mode circuit is designed for signal processing for the optical lever,and 5MHz in bandwidth is achieved.The measurement range and resolution of the system are±4°and 1.2″, respectively.As a test,the system is used to measure the deflection angles at the free end of a cantilever probe of atomic force microscope under step load.The measurement results are consistent well with the calculation by using Timoshenko beam theory.
光学技术Physics and Astronomy-Atomic and Molecular Physics, and Optics
CiteScore
0.60
自引率
0.00%
发文量
6699
期刊介绍：
The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months.
The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".
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