Non-contact measurement method for thickness of optical element

Q4 Physics and Astronomy 光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144006.0535

梁海锋 Liang Haifen, 蔡沛峰 Cai Peifeng

{"title":"Non-contact measurement method for thickness of optical element","authors":"梁海锋 Liang Haifen, 蔡沛峰 Cai Peifeng","doi":"10.3788/GXJS20144006.0535","DOIUrl":null,"url":null,"abstract":"In order to realize non-contact central thickness measurement of the optical elements,an non-contact measurement system is established based on the electrical-optical scanning technology.Continuous moving light points are acquired in the optical axis when annular light produced by electrically controlling the optical switch array crosses the axicon.When the optical element places in the middle of these continuous moving light points,the thickness of the optical elements can be evaluated by monitoring the reflective light energy because the reflective light energy can present a peak when one of light points coincides with a surface of optical element.The mathematics model for testing the thickness of parallel plane plate and lens central thickness are built respectively.The measurement range and accuracy are analyzed in theory.The results show that the measurement range for parallel plate element varies from 5507 mm to 26 mm with the cone angle of axicon increasing from 1°to 40°,its materials refractive index is 1.52 and its radius is 100 mm,and the minimum measurement accuracy can reach to 2.5μm with measurement range of 26 mm.It can satisfy the non-contact measurement requirements of the central thickness of the optical elements.","PeriodicalId":35591,"journal":{"name":"光学技术","volume":"40 1","pages":"535-538"},"PeriodicalIF":0.0000,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"光学技术","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.3788/GXJS20144006.0535","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Physics and Astronomy","Score":null,"Total":0}

引用次数: 0

Abstract

In order to realize non-contact central thickness measurement of the optical elements,an non-contact measurement system is established based on the electrical-optical scanning technology.Continuous moving light points are acquired in the optical axis when annular light produced by electrically controlling the optical switch array crosses the axicon.When the optical element places in the middle of these continuous moving light points,the thickness of the optical elements can be evaluated by monitoring the reflective light energy because the reflective light energy can present a peak when one of light points coincides with a surface of optical element.The mathematics model for testing the thickness of parallel plane plate and lens central thickness are built respectively.The measurement range and accuracy are analyzed in theory.The results show that the measurement range for parallel plate element varies from 5507 mm to 26 mm with the cone angle of axicon increasing from 1°to 40°,its materials refractive index is 1.52 and its radius is 100 mm,and the minimum measurement accuracy can reach to 2.5μm with measurement range of 26 mm.It can satisfy the non-contact measurement requirements of the central thickness of the optical elements.

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

光学元件厚度的非接触式测量方法

为了实现光学元件中心厚度的非接触式测量，建立了基于电光扫描技术的非接触式测量系统。当电控光开关阵列产生的环形光穿过所述光轴时，在光轴上获得连续的移动光点。当光学元件放置在这些连续移动的光点中间时，可以通过监测反射光能来评估光学元件的厚度，因为当其中一个光点与光学元件的表面重合时，反射光能会出现峰值。分别建立了平行平板厚度和透镜中心厚度测试的数学模型。对测量范围和精度进行了理论分析。结果表明，平行板元件的测量范围为5507 ~ 26 mm，轴向锥角从1°增大到40°，材料折射率为1.52，半径为100 mm，最小测量精度可达2.5μm，测量范围为26 mm，可满足光学元件中心厚度的非接触式测量要求。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文去求助

来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍： The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months. The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".