A multi-channel temperature controller for diffusion furnace

W. Lobodzinski , M. Orzylowski , Z. Rudolf
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引用次数: 0

Abstract

The paper describes principle of operation, hardware and software of microcomputer system for direct digital control of Diffusion Furnace. The analog-to-digital converter of Multi-Channel Temperature Controller converts signals of 9 analog sensors of temperature and voltage of power line. Data processing includes examination of measurement results credibility, adaptive filtration and calculation of power signals for control of temperature of work zone of Diffusion Furnace. The furnace can be in one of 11 states. Control algorithms are selected according to actual and destinated states of the furnace.

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一种用于扩散炉的多路温度控制器
介绍了扩散炉直接数字控制微机系统的工作原理、硬件和软件。多路温度控制器的模数转换器对电源线温度和电压的9个模拟传感器的信号进行转换。数据处理包括测量结果可信度的检验、自适应滤波和功率信号的计算,以控制扩散炉工作区的温度。熔炉可以处于11种状态中的一种。根据熔炉的实际和预定状态选择控制算法。
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