{"title":"Guest Editorial Special Section on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing","authors":"John W. Fowler;Karl Kempf;Lars Mönch","doi":"10.1109/TSM.2023.3324469","DOIUrl":null,"url":null,"abstract":"The increasing availability of data, advances in computational and storage capacities of IT systems, and algorithmic advances in Artificial Intelligence (AI), especially Machine Learning (ML) combine to enable significant improvements in the efficiency, operations and throughput of manufacturing systems at the production level. The semiconductor industry is one of the most data-intensive industries and has seen increased use of AI-based technologies over the last few years. In order to develop effective AI-based technologies in the semiconductor manufacturing industry several issues have to be taken into account, including scalability, heterogeneity of data, and the need for interpretability.","PeriodicalId":451,"journal":{"name":"IEEE Transactions on Semiconductor Manufacturing","volume":"36 4","pages":"558-559"},"PeriodicalIF":2.3000,"publicationDate":"2023-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Semiconductor Manufacturing","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10299932/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
The increasing availability of data, advances in computational and storage capacities of IT systems, and algorithmic advances in Artificial Intelligence (AI), especially Machine Learning (ML) combine to enable significant improvements in the efficiency, operations and throughput of manufacturing systems at the production level. The semiconductor industry is one of the most data-intensive industries and has seen increased use of AI-based technologies over the last few years. In order to develop effective AI-based technologies in the semiconductor manufacturing industry several issues have to be taken into account, including scalability, heterogeneity of data, and the need for interpretability.
期刊介绍：
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
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