Chen-Fu Chien;Hans Ehm;John W. Fowler;Karl G. Kempf;Lars Mönch;Cheng-Hung Wu
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引用次数: 0
Abstract
This is a panel paper that discusses the use of Artificial Intelligence (AI) technologies to address production and supply chain level problems in semiconductor manufacturing. We have gathered a group of expert semiconductor researchers and practitioners from around the world who have developed AI solutions for various semiconductor problems. This paper aims to provide their answers to an initial set of questions and provide an overview of the AI developments and empirical studies to make suggestions for future directions in this arena.
期刊介绍：
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
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