Investigation of polymer deposition techniques on a Solidly Mounted Resonator arrays for vapour sensing

Farah Al-Naimi, Malcolm Spain, P. Helfenstein, Taepyeong Kim, Yong-Won Lee, Si Hoon Lee, G. Rughoobur, L. Garcia-Gancedo, A. Flewitt
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引用次数: 1

Abstract

In this work we fabricate and test arrays of Solidly Mounted Resonators (SMRs), which are normally used in RF filters, to make gravimetric vapour sensing system. Each of the SMRs in the array are made to be chemically sensitive using commercially available polymers deposited on the active areas of the resonators using three different deposition techniques, namely needle dispensing, spraying and inkjet printing. Of the three methods, it was found that inkjet printing is the most effective as it can be used with a wide variety of solutions deposited with a good degree of accuracy. Three solvent vapours were used to test chips with polymers deposited using the 3 techniques and the selectivity results are shared.
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用于蒸汽传感的固体谐振器阵列聚合物沉积技术的研究
在这项工作中,我们制造和测试了通常用于射频滤波器的固体安装谐振器(SMRs)阵列,以制造重力蒸汽传感系统。阵列中的每个smr都是化学敏感的,使用商用聚合物沉积在谐振器的有源区域,使用三种不同的沉积技术,即针点胶,喷涂和喷墨打印。在这三种方法中,人们发现喷墨印刷是最有效的,因为它可以与各种各样的溶液沉积在一起使用,并且精度很高。用三种溶剂蒸汽测试了三种技术沉积的聚合物芯片,并分享了选择性结果。
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