{"title":"IC-processed electrostatic micromotors","authors":"Long-Shen Fan, Yu-Chong Tai, Richard S. Muller","doi":"10.1016/0250-6874(89)87100-8","DOIUrl":null,"url":null,"abstract":"<div><p>We describe the design, fabrication and operation of several micromotors that have been produced using integrated-circuit processing. Both rotors and stators for these motors, which are driven by electrostatic forces, are formed from polycrystalline silicon 1.0–1.5 μm thick. The diameters of the rotors in the motors tested are between 60 and 120 μm. Motors with several friction-reducing designs have been fabricated using phosphosilicate glass (PSG) as a sacrificial material and either one or three polysilicon depositions.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"20 1","pages":"Pages 41-47"},"PeriodicalIF":0.0000,"publicationDate":"1989-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87100-8","citationCount":"24","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489871008","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 24
Abstract
We describe the design, fabrication and operation of several micromotors that have been produced using integrated-circuit processing. Both rotors and stators for these motors, which are driven by electrostatic forces, are formed from polycrystalline silicon 1.0–1.5 μm thick. The diameters of the rotors in the motors tested are between 60 and 120 μm. Motors with several friction-reducing designs have been fabricated using phosphosilicate glass (PSG) as a sacrificial material and either one or three polysilicon depositions.
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