{"title":"Gas-sensing characteristics of SnO2—x thin film with added Pt fabricated by the dipping method","authors":"Duk-Dong Lee, Wan-Young Chung","doi":"10.1016/0250-6874(89)80129-5","DOIUrl":null,"url":null,"abstract":"<div><p>SnO<sub>2—<em>x</em></sub> thin films with added platinum are studied. The SnO<sub>2—<em>x</em></sub> thin films are prepared by reactive electron beam evaporation of sintered pellets of SnO<sub>2</sub> powder. The deposited films are dipped into an aqueous solution of H<sub>2</sub>PtCl<sub>6</sub>·6H<sub>2</sub>O and heat treated. The surface structure and composition of the prepared films are investigated by electron spectroscopy for chemical analysis, Auger electron spectroscopy and X-ray diffractometry. The electrical properties of the thin films and the effect of Pt addition on the gas-sensing characteristics have also been investigated.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"20 3","pages":"Pages 301-305"},"PeriodicalIF":0.0000,"publicationDate":"1989-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)80129-5","citationCount":"60","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489801295","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 60
Abstract
SnO2—x thin films with added platinum are studied. The SnO2—x thin films are prepared by reactive electron beam evaporation of sintered pellets of SnO2 powder. The deposited films are dipped into an aqueous solution of H2PtCl6·6H2O and heat treated. The surface structure and composition of the prepared films are investigated by electron spectroscopy for chemical analysis, Auger electron spectroscopy and X-ray diffractometry. The electrical properties of the thin films and the effect of Pt addition on the gas-sensing characteristics have also been investigated.
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