{"title":"Sensitivity Enhancement in Resonant Microbolometers with Dual Mode Operation","authors":"O. Kaya, K. Azgın","doi":"10.1109/IFCS-ISAF41089.2020.9234930","DOIUrl":null,"url":null,"abstract":"This study proposes a novel “vibration amplitude” based sensitivity enhancement method for a resonant-plate microbolometer, which operates in two different mode shapes simultaneously (dual-mode). Thanks to nonlinear cross-coupling between the two resonant modes, the proposed method boosts up the sensitivity of the second operational mode by 25.6% compared to conventional amplitude-based sensing.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"12 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234930","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This study proposes a novel “vibration amplitude” based sensitivity enhancement method for a resonant-plate microbolometer, which operates in two different mode shapes simultaneously (dual-mode). Thanks to nonlinear cross-coupling between the two resonant modes, the proposed method boosts up the sensitivity of the second operational mode by 25.6% compared to conventional amplitude-based sensing.
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