Simiao Xiao, Guangbo Li, Fan Wang, Xiaoqing Jiang, Ming-hua Wang, Jianyi Yang
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引用次数: 1
Abstract
The photonic properties of the silicon-on-glass (SOG) nano-films are analyzed first and the reason why SOG nano-films are required for the nanophotonics is pointed. Then the method to fabricate silicon-on-glass nano-film materials for the applications of nano photonics is established. Anodic boning and selective etching are employed. SOG-based nano-films are then studied.
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