Pub Date : 2006-12-01DOI: 10.1109/NEMS.2006.334722
J. Chien, C. Tsai, Y.T. Cheng, C.R. Yang, P.Y. Wang, T.L. Chang, D.S. Lee, C. W. Chang, W.P. Chou, C. Chiang, Y.W. Lee, P. Chen
Different from traditional detection methods including polymerase chain reaction (PCR) based assays and enzyme-linked immunosorbent assays (ELISA) which are expensive and time consuming for biochemical analysis, in our study, a DNA chip assay using gold nanoparticle (AuNP) immunological amplification method and RFID communication platform were applied to detect DNA sequences rapidly and conveniently. First the capture DNA (cDNA) was immobilized to the substrate on which the capacitor locates. Then the target DNA (tDNA) and probe DNA (pDNA) with a AuNP at the 3' end were added to form several layers of AuNP linked structures. Since the permittivity of the medium in which the capacitor is located changed due to the AuNP-linking structures between the gaps of the microcapacitor, the resonant frequency of series LC circuit shifted immediately. The lab-on-a-chip proposed in this study was power supplied by the radiofrequency identification (RFID) system. The shift of the LC resonant frequency determined whether the tDNA existed. Thus the detection chip needed no any other internal power supply or expensive instruments for electrical signal measurement. The study provides a simple, fast and convenient platform for biochemical detection
{"title":"A RFID Tag Based Remote DNA sensing System","authors":"J. Chien, C. Tsai, Y.T. Cheng, C.R. Yang, P.Y. Wang, T.L. Chang, D.S. Lee, C. W. Chang, W.P. Chou, C. Chiang, Y.W. Lee, P. Chen","doi":"10.1109/NEMS.2006.334722","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334722","url":null,"abstract":"Different from traditional detection methods including polymerase chain reaction (PCR) based assays and enzyme-linked immunosorbent assays (ELISA) which are expensive and time consuming for biochemical analysis, in our study, a DNA chip assay using gold nanoparticle (AuNP) immunological amplification method and RFID communication platform were applied to detect DNA sequences rapidly and conveniently. First the capture DNA (cDNA) was immobilized to the substrate on which the capacitor locates. Then the target DNA (tDNA) and probe DNA (pDNA) with a AuNP at the 3' end were added to form several layers of AuNP linked structures. Since the permittivity of the medium in which the capacitor is located changed due to the AuNP-linking structures between the gaps of the microcapacitor, the resonant frequency of series LC circuit shifted immediately. The lab-on-a-chip proposed in this study was power supplied by the radiofrequency identification (RFID) system. The shift of the LC resonant frequency determined whether the tDNA existed. Thus the detection chip needed no any other internal power supply or expensive instruments for electrical signal measurement. The study provides a simple, fast and convenient platform for biochemical detection","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"278-282"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76969456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-12-01DOI: 10.1109/NEMS.2006.334721
J. Chien, D.S. Lee, W.P. Chou, P.Y. Wang, C.R. Yang, M.H. Wu, C. Tsai, T.L. Chang, Y.W. Lee, Y.T. Cheng, P. Chen
The current real-time PCR (polymerase chain reaction) platforms, which can detect and quantify several target DNA simultaneously, are equipped with discrete optics and detectors for different fluorescence wavelengths. However, the optical loss, due to the different lengths of the channels for several dyes, lowers the performance of fluorescence detection. Especially on the PCR platforms of lab-on-a-chip system, for the dispersion of the fluorescence in the micro fluidic channels, the received fluorescence is much lower than the emitted. To enhance the received intensity on the detection system is therefore a critical issue. The proposed fluorescence detection system, composing of an ultra-sensitive spectrometer, can provide continuous wavelength detection and can be employed for multiple DNA quantification and genotyping in a single reaction. For the tests to the genotyping ability, the melting temperatures of B type HBV and C type HBV can be distinguished by the difference of 1.1degC.The test results in this research show the same degree of sensitivity for DNA quantification and reproducibility within five intra assay samples as compared with a commercial one
{"title":"Simultaneous Quantification for Hepatitis B Virus and Hepatitis C Virus Using Real-time PCR Lab-on-a-chip","authors":"J. Chien, D.S. Lee, W.P. Chou, P.Y. Wang, C.R. Yang, M.H. Wu, C. Tsai, T.L. Chang, Y.W. Lee, Y.T. Cheng, P. Chen","doi":"10.1109/NEMS.2006.334721","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334721","url":null,"abstract":"The current real-time PCR (polymerase chain reaction) platforms, which can detect and quantify several target DNA simultaneously, are equipped with discrete optics and detectors for different fluorescence wavelengths. However, the optical loss, due to the different lengths of the channels for several dyes, lowers the performance of fluorescence detection. Especially on the PCR platforms of lab-on-a-chip system, for the dispersion of the fluorescence in the micro fluidic channels, the received fluorescence is much lower than the emitted. To enhance the received intensity on the detection system is therefore a critical issue. The proposed fluorescence detection system, composing of an ultra-sensitive spectrometer, can provide continuous wavelength detection and can be employed for multiple DNA quantification and genotyping in a single reaction. For the tests to the genotyping ability, the melting temperatures of B type HBV and C type HBV can be distinguished by the difference of 1.1degC.The test results in this research show the same degree of sensitivity for DNA quantification and reproducibility within five intra assay samples as compared with a commercial one","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"464 1","pages":"274-277"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86704845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-12-01DOI: 10.1109/NEMS.2006.334591
Y. Lee, Chun-Hung Chen, Chuan-Pu Liu
In this paper we present a novel method of nano-imprinting which adopts important features of conventional nano-imprinting lithography (NIL) and the newly developed laser-assisted direct imprinting (LADI) method. It utilizes an Nd-YAG pulsed laser of wavelength 1064 nm which can easily penetrate and also heat up a silicon mold which is pressed against a resist layer deposited on a substrate. The fast rising temperature in the silicon mold can momentarily melt the resist layer so that the mold is imprinting into the resist layer. After the pattern is transformed, standard nano-imprinting lithography processes can be applied to the substrate for nano-fabrication. This new method has several advantages over existing nano-imprinting methods mostly due to the fast heating-up of silicon mold by high intensity IR laser pulse and therefore has no thermal drifting problem. Both the theoretical modeling and experimental results of this novel IR-laser assisted imprinting method will be presented
{"title":"A Hybrid Nano-Imprinting Lithography Based on Infrared Pulsed Laser Heating","authors":"Y. Lee, Chun-Hung Chen, Chuan-Pu Liu","doi":"10.1109/NEMS.2006.334591","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334591","url":null,"abstract":"In this paper we present a novel method of nano-imprinting which adopts important features of conventional nano-imprinting lithography (NIL) and the newly developed laser-assisted direct imprinting (LADI) method. It utilizes an Nd-YAG pulsed laser of wavelength 1064 nm which can easily penetrate and also heat up a silicon mold which is pressed against a resist layer deposited on a substrate. The fast rising temperature in the silicon mold can momentarily melt the resist layer so that the mold is imprinting into the resist layer. After the pattern is transformed, standard nano-imprinting lithography processes can be applied to the substrate for nano-fabrication. This new method has several advantages over existing nano-imprinting methods mostly due to the fast heating-up of silicon mold by high intensity IR laser pulse and therefore has no thermal drifting problem. Both the theoretical modeling and experimental results of this novel IR-laser assisted imprinting method will be presented","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"23 1","pages":"6-10"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74472912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-07DOI: 10.1109/NEMS.2006.334735
M. Tabib-Azar, Run Wang, Yan Xie, L. You
Self-welded double-wall and multi-wall carbon nanotube (DWCNT and MWCNT) bridges were used for the first time as nano-scale piezoresistors to monitor vibration and deformation of silicon cantilever beams. The CNTs were grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon-on-insulator posts situated over cantilever beams such that when the beams were deformed, CNTs were axially strained. Telescoping of inner CNT cylinders occurring under these axial strains changed the CNTs resistance. The CNT-post weld strength, as measured using atomic force microscope, was larger than 100 nN/CNT and their full-scale resistance change was larger than 105 Ω. The effective longitudinal piezoresistivity of CNTs was larger than 4×10-8 Pa-1 which is more than 10 times larger than that of Π44 in silicon
{"title":"Self-Welded Metal-Catalyzed Carbon Nanotube Piezoresistors with Very Large Longitudinal Piezoresistivity of ~ 4×10-8 Pa-1","authors":"M. Tabib-Azar, Run Wang, Yan Xie, L. You","doi":"10.1109/NEMS.2006.334735","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334735","url":null,"abstract":"Self-welded double-wall and multi-wall carbon nanotube (DWCNT and MWCNT) bridges were used for the first time as nano-scale piezoresistors to monitor vibration and deformation of silicon cantilever beams. The CNTs were grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon-on-insulator posts situated over cantilever beams such that when the beams were deformed, CNTs were axially strained. Telescoping of inner CNT cylinders occurring under these axial strains changed the CNTs resistance. The CNT-post weld strength, as measured using atomic force microscope, was larger than 100 nN/CNT and their full-scale resistance change was larger than 105 Ω. The effective longitudinal piezoresistivity of CNTs was larger than 4×10-8 Pa-1 which is more than 10 times larger than that of Π44 in silicon","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"70 1","pages":"1297-1302"},"PeriodicalIF":0.0,"publicationDate":"2006-05-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90655160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334609
P. Shih, W. Shih, Tzung-Han Lin, Han-Pang Huang
A three-dimensional microprobe, which is capable of measuring the forces exerting on the probing pin in all directions, is presented. The microprobe is fabricated on stainless steel and is covered by two sets of piezoelectric transducers. One of the transducers drives the probe, and the other senses the dynamic response to identify the contact between the pin and obstacles. A theoretical model is carried out to investigate the transition of the microprobe between contact and non-contact states. Accordingly, a bifurcation diagram is established to provide a design reference for the optimization of driving frequency. A finite element simulation is also carried out for the complete design optimization. Indeed, the fabricated microprobe can be used for the coordinate measurement of the high-aspect-ratio micro-structures
{"title":"Dynamic Performance of Micro Coordinate Measurement Probe","authors":"P. Shih, W. Shih, Tzung-Han Lin, Han-Pang Huang","doi":"10.1109/NEMS.2006.334609","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334609","url":null,"abstract":"A three-dimensional microprobe, which is capable of measuring the forces exerting on the probing pin in all directions, is presented. The microprobe is fabricated on stainless steel and is covered by two sets of piezoelectric transducers. One of the transducers drives the probe, and the other senses the dynamic response to identify the contact between the pin and obstacles. A theoretical model is carried out to investigate the transition of the microprobe between contact and non-contact states. Accordingly, a bifurcation diagram is established to provide a design reference for the optimization of driving frequency. A finite element simulation is also carried out for the complete design optimization. Indeed, the fabricated microprobe can be used for the coordinate measurement of the high-aspect-ratio micro-structures","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"21 1","pages":"1047-1051"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73999281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334733
Wansheng Zhao, Xiaohai Li, Zhenlong Wang
Electrochemical machining (ECM) is an anodic dissolution process of metal as anode ion by ion, and micro-ECM is a promising micro machining method at micro to mesoscale. Thus, a micro-ECM setup was developed to fabricate micro parts and explore the feasibility of micro-ECM at micro to mesoscale, including the design of high-frequency micro-energy pulse power supply. By using the detection unit of machining state and optical encoder, a closed loop control system for micro-ECM was developed. Under low concentration of passivating electrolyte, low machining voltage and high-frequency short-pulse current, the machining gap can be reduced to about 10 mum. A deep micro-hole about 100 mum in diameter was drilled by edge-cut electrode on stainless steel with 750 mum thickness. The process of NC micro-EC milling is proposed, and microstructures with high-aspect ratio on stainless steel were fabricated by micro-EC milling, such as profiled micro-hole, micro spiral beam and micro array square columns
{"title":"Study on Micro Electrochemical Machining at Micro to Meso-scale","authors":"Wansheng Zhao, Xiaohai Li, Zhenlong Wang","doi":"10.1109/NEMS.2006.334733","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334733","url":null,"abstract":"Electrochemical machining (ECM) is an anodic dissolution process of metal as anode ion by ion, and micro-ECM is a promising micro machining method at micro to mesoscale. Thus, a micro-ECM setup was developed to fabricate micro parts and explore the feasibility of micro-ECM at micro to mesoscale, including the design of high-frequency micro-energy pulse power supply. By using the detection unit of machining state and optical encoder, a closed loop control system for micro-ECM was developed. Under low concentration of passivating electrolyte, low machining voltage and high-frequency short-pulse current, the machining gap can be reduced to about 10 mum. A deep micro-hole about 100 mum in diameter was drilled by edge-cut electrode on stainless steel with 750 mum thickness. The process of NC micro-EC milling is proposed, and microstructures with high-aspect ratio on stainless steel were fabricated by micro-EC milling, such as profiled micro-hole, micro spiral beam and micro array square columns","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"42 1","pages":"325-329"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74424344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334909
Simiao Xiao, Guangbo Li, Fan Wang, Xiaoqing Jiang, Ming-hua Wang, Jianyi Yang
The photonic properties of the silicon-on-glass (SOG) nano-films are analyzed first and the reason why SOG nano-films are required for the nanophotonics is pointed. Then the method to fabricate silicon-on-glass nano-film materials for the applications of nano photonics is established. Anodic boning and selective etching are employed. SOG-based nano-films are then studied.
{"title":"Photonic Properties of Silicon-on-Glass Nano-Films and its Fabrication","authors":"Simiao Xiao, Guangbo Li, Fan Wang, Xiaoqing Jiang, Ming-hua Wang, Jianyi Yang","doi":"10.1109/NEMS.2006.334909","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334909","url":null,"abstract":"The photonic properties of the silicon-on-glass (SOG) nano-films are analyzed first and the reason why SOG nano-films are required for the nanophotonics is pointed. Then the method to fabricate silicon-on-glass nano-film materials for the applications of nano photonics is established. Anodic boning and selective etching are employed. SOG-based nano-films are then studied.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"5 1","pages":"846-850"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72982833","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334617
Yuanyuan Xu, S. Xia, C. Bian, Shaofeng Chen
A novel amperometric immunosensor fabricated by microelectromechanical systems (MEMS) technology with a novel modified procedure for immobilization of antibody on gold electrode has been developed. Based on MEMS technology, immunosensor with a three-microelectrode system integrated with two SU-8 micro pools was fabricated. Employing self-assembled monolayers technique, the working electrode was modified by 1,6-hexanedithiol to assemble gold nanoparticles layer, subsequently, a layer of protein A was immobilized on nanogold layer to further capture antibody. Compared with the amperometric immunosensors using traditionally metal rod/slice electrode or screen-printed electrode, it has attractive advantages, such as miniaturization, compatibility with CMOS techniques and easy to be designed into micro array. Moreover, the studied immunosensor showed high specificity, good reproducibility and broad linear range for the detection of human immunoglobulin (HIgG), which makes it potentially attractive for clinical immunoassays
{"title":"A Micro Amperometric Immunosensor Based on Protein A/Gold nanoparticles/Self-assembled Monolayer-Modified Gold Electrode","authors":"Yuanyuan Xu, S. Xia, C. Bian, Shaofeng Chen","doi":"10.1109/NEMS.2006.334617","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334617","url":null,"abstract":"A novel amperometric immunosensor fabricated by microelectromechanical systems (MEMS) technology with a novel modified procedure for immobilization of antibody on gold electrode has been developed. Based on MEMS technology, immunosensor with a three-microelectrode system integrated with two SU-8 micro pools was fabricated. Employing self-assembled monolayers technique, the working electrode was modified by 1,6-hexanedithiol to assemble gold nanoparticles layer, subsequently, a layer of protein A was immobilized on nanogold layer to further capture antibody. Compared with the amperometric immunosensors using traditionally metal rod/slice electrode or screen-printed electrode, it has attractive advantages, such as miniaturization, compatibility with CMOS techniques and easy to be designed into micro array. Moreover, the studied immunosensor showed high specificity, good reproducibility and broad linear range for the detection of human immunoglobulin (HIgG), which makes it potentially attractive for clinical immunoassays","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"45 1","pages":"38-41"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75572093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334759
J. Lan, Zhaohui Zhang, Tian Lan
This paper presents a novel application of MEMS accelerometer in target classification by means of advanced information processing. The detection system based on MEMS accelerometer is small in size, light in weight, has low power consumption and low cost, and can work under severe circumstances for many different applications. In order to extract features of seismic signals stimulated by different vehicle targets and to recognize targets, seismic properties of typical vehicle targets are researched in the paper. A technique of artificial neural networks combined with genetic algorithm (ANNCGA) is applied to classification of seismic signals that belong to different kinds of vehicle targets. The technique and its architecture have been presented. The algorithm had been used for classification of seismic signals of vehicle targets in the outdoor environment. Through experiments, it can be proven that seismic properties of target acquired are correct, ANNCGA method is effective to solve the problem of target classification, and MEMS accelerometer can be used in vehicle target classification
{"title":"Research on Application of MEMS Accelerometer in Target Classification by Advanced Information Processing","authors":"J. Lan, Zhaohui Zhang, Tian Lan","doi":"10.1109/NEMS.2006.334759","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334759","url":null,"abstract":"This paper presents a novel application of MEMS accelerometer in target classification by means of advanced information processing. The detection system based on MEMS accelerometer is small in size, light in weight, has low power consumption and low cost, and can work under severe circumstances for many different applications. In order to extract features of seismic signals stimulated by different vehicle targets and to recognize targets, seismic properties of typical vehicle targets are researched in the paper. A technique of artificial neural networks combined with genetic algorithm (ANNCGA) is applied to classification of seismic signals that belong to different kinds of vehicle targets. The technique and its architecture have been presented. The algorithm had been used for classification of seismic signals of vehicle targets in the outdoor environment. Through experiments, it can be proven that seismic properties of target acquired are correct, ANNCGA method is effective to solve the problem of target classification, and MEMS accelerometer can be used in vehicle target classification","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"6 1","pages":"363-367"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78416297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334766
Zhihao Hou, Zewen Liu, Guangwei Hu, Litian Liu, Zhijian Li
Study on the relationship between the breakdown voltage and the nano-topography of electrode surface is presented. The bottom electrode is electroplated with three different current densities. The measured RMS roughness for the obtained electrodes is 27.4nm, 16.0nm and 5.4nm correspondingly. PECVD 300degC Si3N4 is deposited onto the electrodes as dielectric layer. After measuring the surface nano-topography of both the metallic surface and the dielectric surface, it is founded that the RMS roughness of Si3N4 layer is determined by that of the bottom electrode. Applying a ramping DC voltage between the up- and bottom- electrode, different breakdown voltages are obtained. For the switches with electrode roughness of 27.4nm, 16.0nm and 5.4nm, the breakdown event maximum is in the voltage ranges of 20-40V, 30-60V and 80-110V respectively
{"title":"Study on the Nano-topography of the Electrode Surface and the Breakdown Voltage in RF MEMS Switches","authors":"Zhihao Hou, Zewen Liu, Guangwei Hu, Litian Liu, Zhijian Li","doi":"10.1109/NEMS.2006.334766","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334766","url":null,"abstract":"Study on the relationship between the breakdown voltage and the nano-topography of electrode surface is presented. The bottom electrode is electroplated with three different current densities. The measured RMS roughness for the obtained electrodes is 27.4nm, 16.0nm and 5.4nm correspondingly. PECVD 300degC Si3N4 is deposited onto the electrodes as dielectric layer. After measuring the surface nano-topography of both the metallic surface and the dielectric surface, it is founded that the RMS roughness of Si3N4 layer is determined by that of the bottom electrode. Applying a ramping DC voltage between the up- and bottom- electrode, different breakdown voltages are obtained. For the switches with electrode roughness of 27.4nm, 16.0nm and 5.4nm, the breakdown event maximum is in the voltage ranges of 20-40V, 30-60V and 80-110V respectively","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"42 1","pages":"395-398"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77685207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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