{"title":"Design and analysis of SAW pressure sensing element based on IDT/AlN/Mo/diamond multilayered structure","authors":"Xiaoxin Ma, Q. Xiao, Yanping Fan, X. Ji","doi":"10.1051/aacus/2022038","DOIUrl":null,"url":null,"abstract":"The multilayer structure of surface acoustic wave sensor is an important development direction of surface acoustic wave devices in recent years. In this paper, the IDT/AlN/Mo/diamond structure of surface acoustic wave pressure sensing element is modeled and simulated. The influence of the thickness of AlN and IDT on pressure coefficient frequency and K2 were simulated and analyzed. The performance of surface acoustic wave pressure sensing element is compared when the metal layer is Mo, no metal layer and the metal layer is Pt. Finally, the relationship between frequency variation and pressure of the designed multilayer surface acoustic wave pressure sensing element is obtained. This research provides a good guidance for the design of surface acoustic wave pressure sensor.","PeriodicalId":48486,"journal":{"name":"Acta Acustica","volume":"40 1","pages":""},"PeriodicalIF":1.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Acta Acustica","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1051/aacus/2022038","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ACOUSTICS","Score":null,"Total":0}
引用次数: 0
Abstract
The multilayer structure of surface acoustic wave sensor is an important development direction of surface acoustic wave devices in recent years. In this paper, the IDT/AlN/Mo/diamond structure of surface acoustic wave pressure sensing element is modeled and simulated. The influence of the thickness of AlN and IDT on pressure coefficient frequency and K2 were simulated and analyzed. The performance of surface acoustic wave pressure sensing element is compared when the metal layer is Mo, no metal layer and the metal layer is Pt. Finally, the relationship between frequency variation and pressure of the designed multilayer surface acoustic wave pressure sensing element is obtained. This research provides a good guidance for the design of surface acoustic wave pressure sensor.
期刊介绍：
Acta Acustica, the Journal of the European Acoustics Association (EAA).
After the publication of its Journal Acta Acustica from 1993 to 1995, the EAA published Acta Acustica united with Acustica from 1996 to 2019. From 2020, the EAA decided to publish a journal in full Open Access. See Article Processing charges.
Acta Acustica reports on original scientific research in acoustics and on engineering applications. The journal considers review papers, scientific papers, technical and applied papers, short communications, letters to the editor. From time to time, special issues and review articles are also published. For book reviews or doctoral thesis abstracts, please contact the Editor in Chief.
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