{"title":"Physics of reactive plasmas for material tailoring","authors":"R. Itatani","doi":"10.1016/S1288-3255(99)80005-7","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101031,"journal":{"name":"Plasmas & Ions","volume":"5 1","pages":"37-44"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas & Ions","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S1288-3255(99)80005-7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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