{"title":"Signal superimposition of piezoresistive pressure transducers","authors":"Yu Lian-Zhong, Bao Min-Hang","doi":"10.1016/0250-6874(89)87054-4","DOIUrl":null,"url":null,"abstract":"<div><p>Signal superimposition for silicon pressure transducers is an approach to make full use of the vast area available on silicon diaphragms to boost signal output, to eliminate the sensitivity to a magnetic field for transverse-voltage type pressure sensors and some other possible applications. Three types of signal superimposition methods are proposed here and a monolithic integrated circuit pressure transducer using active amplifiers is presented.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"19 1","pages":"Pages 23-31"},"PeriodicalIF":0.0000,"publicationDate":"1989-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87054-4","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870544","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Signal superimposition for silicon pressure transducers is an approach to make full use of the vast area available on silicon diaphragms to boost signal output, to eliminate the sensitivity to a magnetic field for transverse-voltage type pressure sensors and some other possible applications. Three types of signal superimposition methods are proposed here and a monolithic integrated circuit pressure transducer using active amplifiers is presented.
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