A study on problem solving strategy using experiment of design

X. Ji, S. Kang
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引用次数: 1

Abstract

This paper presents an approach to solving the problems though the method of design of experiment (DOE). In generally, all problems in semiconductor industry can be summarized as 3 types, called Type X, A and T. The definition is based on whether it's clear for root cause and improvement action of problems. According to the problem types, different solutions are recommended to different problem types for effectively solving the issues. In this paper, we introduced a problem solving strategy to identify the problem types and provided a reasonable solution plan based on DOE method. And one flow is designed in this paper to instruct the problem identification and solution determination. The screening method and optimal design method of DOE are recommended for its wide applications and rigorous statistical theory. Two examples are described to using the flow of real problems solving. The result shows the flow can clearly identify and settle the issues.
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问题解决策略的设计实验研究
本文提出了一种通过实验设计方法来解决这些问题的方法。总的来说,半导体行业的所有问题可以概括为3种类型,分别是X型、A型和t型。定义的依据是问题的根本原因和改进措施是否明确。根据问题类型,针对不同的问题类型推荐不同的解决方案,以有效解决问题。本文引入了一种基于DOE方法的问题求解策略来识别问题类型,并给出了合理的解决方案。并设计了一个指导问题识别和解决方案确定的流程。由于DOE的筛选方法和优化设计方法具有广泛的适用性和严格的统计理论。描述了两个使用实际问题解决流程的示例。结果表明,该流程能够清晰地识别和解决问题。
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