Analysis Thermodynamic Analysis of Air Conditioning System of Clean Rooms

Abstract

For implementing high-tech microelectronic production processes, particularly clean conditions are required as determined by technological microclimate. This paper analyzes the thermodynamic efficiency of the research system we make a balance for a scheme of air-conditioning for clean rooms on the basis of which absolute and relative characteristics of the system are determined, and then Grassmann diagrams are constructed. These fully reflect the fluxes and losses of exergy. The analysis of Grassmann diagrams in warm and cold periods of the year shows that to increase the coefficient of exergy in the warm period of the year (+13 °С). It is necessary to reduce exergy losses during the processes of humidification and heating of air, and in cold period (−3 °С) exergy losses are evenly distributed, and the system should be improved.