Kyung-Suk Shim , Sung-Min Kim , Sang Hyuck Bae , Sang Yeol Lee , Hae-suk Jung , Hyung-ho Park
{"title":"Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition","authors":"Kyung-Suk Shim , Sung-Min Kim , Sang Hyuck Bae , Sang Yeol Lee , Hae-suk Jung , Hyung-ho Park","doi":"10.1016/S0169-4332(99)00401-8","DOIUrl":null,"url":null,"abstract":"<div><div><span><span>Diamond-like carbon (DLC) thin films<span> have shown advantageous field emission properties due to a negative electron affinity<span> (NEA) and low work function. The experiment was performed at </span></span></span>substrate temperature<span> in the range of room temperature to 600°C. The laser energy density used was in the range 6–20 J/cm</span></span><sup>2</sup><span>. SEM, Raman, photoluminescence (PL), XPS and </span><em>I</em>–<em>V</em><span><span><span> measurement were used to investigate the microstructure and the field emission properties of DLC thin films. </span>Deposition parameters, such as laser </span>energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with </span><em>E</em><sub>th</sub>=5.03 V/μm at 300°C and 12 J/cm<sup>2</sup>.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"154 ","pages":"Pages 482-484"},"PeriodicalIF":6.9000,"publicationDate":"2000-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Surface Science","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0169433299004018","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 0
Abstract
Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600°C. The laser energy density used was in the range 6–20 J/cm2. SEM, Raman, photoluminescence (PL), XPS and I–V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with Eth=5.03 V/μm at 300°C and 12 J/cm2.
期刊介绍：
Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.
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