The collisional, capacitive RF sheath: models with and without the approximation of a sharp electron edge

R. Brinkmann
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Abstract

The transition from quasi-neutrality to charge depletion is one of the characteristic features of the plasma boundary sheath. For modeling purposes, this transition is often described in terms of the so-called step model which assumes a sharp transition point s (electron step) where the electron density ne drops from a value equal to the ion density ni (in the bulk, x>s) to a value of zero (in the sheath, x
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从准中性到电荷耗尽的转变是等离子体边界鞘的特征之一。出于建模目的,这种转变通常用所谓的阶梯模型来描述,该模型假设有一个急剧的转变点s(电子阶梯),其中电子密度ne从等于离子密度ni的值(在体中,x>s)下降到零值(在鞘层中,x
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