The collisional, capacitive RF sheath: models with and without the approximation of a sharp electron edge

2008 IEEE 35th International Conference on Plasma Science Pub Date : 2008-06-15 DOI:10.1109/PLASMA.2008.4590656

R. Brinkmann

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Abstract

The transition from quasi-neutrality to charge depletion is one of the characteristic features of the plasma boundary sheath. For modeling purposes, this transition is often described in terms of the so-called step model which assumes a sharp transition point s (electron step) where the electron density ne drops from a value equal to the ion density ni (in the bulk, x>s) to a value of zero (in the sheath, x

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