A novel design and fabrication method of scanning micro-mirror for retinal scan displays

Abstract

In this paper, we present a novel scheme for designing and fabricating a single axis scanning micro mirror. The device is the match of two chips using a flip chip bonder. In this paper, we describe mostly the top chip that includes the reflecting surface. The device is very low cost and electrostatically actuated with a relatively low voltage. We present the fabrication process scheme, based on wet etching of silicon wafers. We also present the motivation to use thin wafers, as much as 50 /spl mu/m thick, to reach a resonant frequency of 15-30 kHz, suitable for raster scanners such as retinal scan displays. Finally, we present a preliminary prototype produced by such a process.