H2S gas sensing studies of CdXZn1−XO thin films synthesized at low temperature by advanced spray pyrolysis technique

C. R. Bobade, S. Mahajan, M. Uplane
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引用次数: 2

Abstract

Cadmium zinc oxide (CdXZn1-XO) thin films were deposited at low substrate temperature using advanced spray pyrolysis technique. Aqueous solution of cadmium acetate and zinc acetate were used as initial ingredients. The films were prepared by keeping optimized preparative parameters constant. Influence of variation of zinc in the `CdXZn1-XO' system on the structural, electrical and gas sensing properties of the films has been investigated. X-ray diffraction studies indicate polycrystalline nature of the films. Field emission scanning electron micrograph measurements reveal that the grain size decreases with increase in zinc content. It is found that films are sensitive to H2S gas and maximum response is observed at the operating temperature of 300°C.
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先进喷雾热解技术低温合成CdXZn1−XO薄膜的H2S气敏研究
采用先进的喷雾热解技术,在低温下制备了氧化镉锌(CdXZn1-XO)薄膜。以醋酸镉和醋酸锌水溶液为初始原料。在保持最佳制备参数不变的情况下,制备了膜。研究了CdXZn1-XO体系中锌含量的变化对薄膜结构、电学和气敏性能的影响。x射线衍射研究表明薄膜具有多晶性质。场发射扫描电镜显示,随着锌含量的增加,晶粒尺寸减小。发现薄膜对H2S气体敏感,在300℃的工作温度下达到最大响应。
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