Analysis of the motional capacitance of the electric equivalent circuit of quartz-crystal tuning fork using L-shaped bar model with torsion spring and in consideration of electric field distribution

T. Ishikawa, H. Itoh
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Abstract

We derived the motional capacitance of quartz-crystal tuning fork using L-shaped bar model with torsion spring and in consideration of both electric field distribution and the width of electrodes. If the width and the length of electrodes are taken into consideration, the calculated values of motional capacitance of the tuning fork with 100µm in thickness are good agreement with the measured ones under three boundary conditions; free-free bar, clamped-free bar, and L-shaped bar models.
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采用带扭簧的l形杆模型,考虑电场分布,分析石英晶体音叉等效电路的运动电容
在考虑电场分布和电极宽度的情况下,采用带扭力弹簧的l形杆模型推导了石英晶体音叉的运动电容。在考虑电极宽度和长度的情况下,在三种边界条件下,厚度为100µm的音叉运动电容的计算值与实测值吻合较好;自由-自由棒,夹紧-自由棒和l型棒模型。
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